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Sputter optimization of AlN on diamond substrates for high frequency SAW resonators
Citation
Rodriguez Madrid, Juan and Fuentes Iriarte, Gonzalo and Calle Gómez, Fernando and Araujo, Daniel and Villar, María Del Pilar and Williams, Oliver A. (2011). Sputter optimization of AlN on diamond substrates for high frequency SAW resonators. In: "8th Spanish Conference on Electron Devices, CDE'2011", 09/02/2011 - 11/02/2011, Palma de Mallorca, España. ISBN 978-1-4244-7863-7. pp. 1-4. https://doi.org/10.1109/SCED.2011.5744181.
Description
| Title: | Sputter optimization of AlN on diamond substrates for high frequency SAW resonators |
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| Author/s: |
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| Item Type: | Presentation at Congress or Conference (Article) |
| Event Title: | 8th Spanish Conference on Electron Devices, CDE'2011 |
| Event Dates: | 09/02/2011 - 11/02/2011 |
| Event Location: | Palma de Mallorca, España |
| Title of Book: | Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011 |
| Date: | 2011 |
| ISBN: | 978-1-4244-7863-7 |
| Subjects: | |
| Faculty: | E.T.S.I. Telecomunicación (UPM) |
| Department: | Ingeniería Electrónica |
| Creative Commons Licenses: | Recognition - No derivative works - Non commercial |
Abstract
The AlN/diamond structure is an attractive combination for SAW devices and its application at high frequencies. In this work, the synthesis of AlN thin films by reactive sputtering has been optimized on diamond substrates in order to process high frequency devices. Polished microcrystalline and as-grown nanocrystalline diamond substrates have been used to deposit AlN of different thickness under equal sputtering conditions. For the smoother substrates, the FWHM of the rocking curve of the (002) AlN peak varies from 3.8° to 2.7° with increasing power. SAW one port resonators have been fabricated on these films, whose electrical characterization (in terms of S11 parameters) is reported.
More information
| Item ID: | 11973 |
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| DC Identifier: | https://oa.upm.es/11973/ |
| OAI Identifier: | oai:oa.upm.es:11973 |
| DOI: | 10.1109/SCED.2011.5744181 |
| Official URL: | http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5744181 |
| Deposited by: | Memoria Investigacion |
| Deposited on: | 18 Dec 2012 17:52 |
| Last Modified: | 21 Apr 2016 11:10 |
