Fabrication of GaN nanorods by focused ion beam

Martinez Rodrigo, Javier, Barbagini, Francesca, Bengoechea Encabo, Ana, Albert, Steven, Sánchez García, Miguel Angel and Calleja Pardo, Enrique (2011). Fabrication of GaN nanorods by focused ion beam. In: "37th International Conference on Micro and Nano Engineering", 19/09/2011 - 23/09/2011, Berlín, Alemania. pp..

Description

Title: Fabrication of GaN nanorods by focused ion beam
Author/s:
  • Martinez Rodrigo, Javier
  • Barbagini, Francesca
  • Bengoechea Encabo, Ana
  • Albert, Steven
  • Sánchez García, Miguel Angel
  • Calleja Pardo, Enrique
Item Type: Presentation at Congress or Conference (Poster)
Event Title: 37th International Conference on Micro and Nano Engineering
Event Dates: 19/09/2011 - 23/09/2011
Event Location: Berlín, Alemania
Title of Book: Proceedings of 37th International Conference on Micro and Nano Engineering
Date: 2011
Subjects:
Faculty: Instituto de Sistemas Optoelectrónicos y Microtecnología (ISOM) (UPM)
Department: Otro
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

Ordered arrays of III-Nitride nanocolumns are excellent candidates for the fabrication of nano-optoelectronic devices. Different technologies such as e-beam lithography or colloidal lithography, have been used to obtain ordered arrays. All these technologies have in common several processing steps that can affect the crystalline growth of the nanocolumns. In this work, we present a single lithographic step that permits to grow ordered GaN nanocolumns with different geometries. The patterning is based in the use of a focusedionbeam with different doses. With this method has been possible to create GaN nanopillars and nanocylinders

More information

Item ID: 12911
DC Identifier: https://oa.upm.es/12911/
OAI Identifier: oai:oa.upm.es:12911
Official URL: http://www.mne2011.org/
Deposited by: Memoria Investigacion
Deposited on: 08 Nov 2012 11:01
Last Modified: 21 Apr 2016 12:14
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