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Fabrication of GaN nanorods by focused ion beam
Citation
Martinez Rodrigo, Javier and Barbagini, Francesca and Bengoechea Encabo, Ana and Albert, Steven and Sánchez García, Miguel Angel and Calleja Pardo, Enrique (2011). Fabrication of GaN nanorods by focused ion beam. In: "37th International Conference on Micro and Nano Engineering", 19/09/2011 - 23/09/2011, Berlín, Alemania. pp..
Description
| Title: | Fabrication of GaN nanorods by focused ion beam |
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| Author/s: |
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| Item Type: | Presentation at Congress or Conference (Poster) |
| Event Title: | 37th International Conference on Micro and Nano Engineering |
| Event Dates: | 19/09/2011 - 23/09/2011 |
| Event Location: | Berlín, Alemania |
| Title of Book: | Proceedings of 37th International Conference on Micro and Nano Engineering |
| Date: | 2011 |
| Subjects: | |
| Faculty: | Instituto de Sistemas Optoelectrónicos y Microtecnología (ISOM) (UPM) |
| Department: | Otro |
| Creative Commons Licenses: | Recognition - No derivative works - Non commercial |
Abstract
Ordered arrays of III-Nitride nanocolumns are excellent candidates for the fabrication of nano-optoelectronic devices. Different technologies such as e-beam lithography or colloidal lithography, have been used to obtain ordered arrays. All these technologies have in common several processing steps that can affect the crystalline growth of the nanocolumns. In this work, we present a single lithographic step that permits to grow ordered GaN nanocolumns with different geometries. The patterning is based in the use of a focusedionbeam with different doses. With this method has been possible to create GaN nanopillars and nanocylinders
More information
| Item ID: | 12911 |
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| DC Identifier: | https://oa.upm.es/12911/ |
| OAI Identifier: | oai:oa.upm.es:12911 |
| Official URL: | http://www.mne2011.org/ |
| Deposited by: | Memoria Investigacion |
| Deposited on: | 08 Nov 2012 11:01 |
| Last Modified: | 21 Apr 2016 12:14 |
