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Martí Vega, Antonio ORCID: https://orcid.org/0000-0002-8841-7091, Algora del Valle, Carlos
ORCID: https://orcid.org/0000-0003-1872-7243 and Lopez Araujo, Gerardo
(1990).
Diffusion of Zn into GaAs and AlGaAs from isothermal Liquid-phase epitaxy solutions.
"Journal of Applied Physics", v. 37
(n. 5);
pp. 2723-2730.
ISSN 0021-8979.
https://doi.org/10.1063/1.346447.
Title: | Diffusion of Zn into GaAs and AlGaAs from isothermal Liquid-phase epitaxy solutions |
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Author/s: |
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Item Type: | Article |
Título de Revista/Publicación: | Journal of Applied Physics |
Date: | 1990 |
ISSN: | 0021-8979 |
Volume: | 37 |
Subjects: | |
Faculty: | E.T.S.I. Telecomunicación (UPM) |
Department: | Electrónica Física |
Creative Commons Licenses: | Recognition - No derivative works - Non commercial |
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In this work we present results of zinc diffusion in GaAs using the liquid phase epitaxy technique from liquid solutions of Ga‐As‐Zn and Ga‐As‐Al‐Zn. Using silicon‐doped n‐GaAs substrates, working at a diffusion temperature of 850 °C, and introducing a dopant concentration ranging 1018–1019 cm−3, the most important findings regarding the diffusion properties are as follows: (a) zinc concentration in the solid depends on the square root of zinc atomic fraction in the liquid; (b) the diffusion is dominated by the interstitial‐substitutional process; (c) the diffusivity D varies as about C3 in the form D=2.9×10−67C3.05; (d) aluminum plays the role of the catalyst of the diffusion process, if it is introduced in the liquid solution, since it is found that D varies as (γAsXlAs)−1; (e) the zinc interstitial is mainly doubly ionized (Zn++i); (f) the zinc diffusion coefficient in Al0.85 Ga0.15 As is about four times greater than in GaAs; (g) by means of all these results, it is possible to control zinc diffusion processes in order to obtain optimized depth junctions and doping levels in semiconductor device fabrication.
Item ID: | 13909 |
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DC Identifier: | https://oa.upm.es/13909/ |
OAI Identifier: | oai:oa.upm.es:13909 |
DOI: | 10.1063/1.346447 |
Official URL: | http://jap.aip.org/resource/1/japiau/v68/i6/p2723_... |
Deposited by: | Memoria Investigacion |
Deposited on: | 22 Feb 2013 11:14 |
Last Modified: | 21 Apr 2016 13:20 |