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Hofstetter, Jasmin and Fenning, David P. and Lelievre, Jean Francoise and Cañizo Nadal, Carlos del and Buonassisi, Tonio (2012). Engineering metal precipitate size distributions to enhance gettering in multicrystalline silicon. "Physica Status Solidi a-Applications And Materials Science", v. 209 (n. 10); pp. 1861-1865. ISSN 1862-6300. https://doi.org/10.1002/pssa.201200360.
Title: | Engineering metal precipitate size distributions to enhance gettering in multicrystalline silicon |
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Author/s: |
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Item Type: | Article |
Título de Revista/Publicación: | Physica Status Solidi a-Applications And Materials Science |
Date: | 20 August 2012 |
ISSN: | 1862-6300 |
Volume: | 209 |
Subjects: | |
Freetext Keywords: | defect engineering, gettering, silicon solar cells, simulation |
Faculty: | E.T.S.I. Telecomunicación (UPM) |
Department: | Electrónica Física |
Creative Commons Licenses: | Recognition - No derivative works - Non commercial |
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The extraction of metal impurities during phosphorus diffusion gettering (PDG) is one of the crucial process steps when fabricating high-efficiency solar cells using low-cost, lower-purity silicon wafers. In this work, we show that for a given metal concentration, the size and density of metal silicide precipitates strongly influences the gettering efficacy. Different precipitate size distributions can be already found in silicon wafers grown by different techniques. In our experiment, however, the as-grown distribution of precipitated metals in multicrystalline Si sister wafers is engineered through different annealing treatments in order to control for the concentration and distribution of other defects. A high density of small precipitates is formed during a homogenization step, and a lower density of larger precipitates is formed during extended annealing at 740º C. After PDG, homogenized samples show a decreased interstitial iron concentration compared to as-grown and ripened samples, in agreement with simulations.
Item ID: | 15421 |
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DC Identifier: | https://oa.upm.es/15421/ |
OAI Identifier: | oai:oa.upm.es:15421 |
DOI: | 10.1002/pssa.201200360 |
Deposited by: | Memoria Investigacion |
Deposited on: | 11 Jun 2013 16:46 |
Last Modified: | 22 Sep 2014 11:07 |