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Fabrication of GaN nanorods by focused ion beam
Citation
Martinez Rodrigo, Javier, Barbagini, Francesca, Bengoechea Encabo, Ana, Albert, Steven, Sánchez García, Miguel Angel and Calleja Pardo, Enrique (2012). Fabrication of GaN nanorods by focused ion beam. "Microelectronic Engineering", v. 98 ; pp. 250-253. ISSN 0167-9317. https://doi.org/10.1016/j.mee.2012.07.006.
Description
| Title: | Fabrication of GaN nanorods by focused ion beam |
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| Author/s: |
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| Item Type: | Article |
| Título de Revista/Publicación: | Microelectronic Engineering |
| Date: | October 2012 |
| ISSN: | 0167-9317 |
| Volume: | 98 |
| Subjects: | |
| Freetext Keywords: | Nanorods, GaN, FIB, Nanotechnology |
| Faculty: | Instituto de Sistemas Optoelectrónicos y Microtecnología (ISOM) (UPM) |
| Department: | Otro |
| Creative Commons Licenses: | Recognition - No derivative works - Non commercial |
Abstract
Ordered arrays of III-Nitride nanocolumns are excellent candidates for the fabrication of nano-optoelectronic devices. Different technologies such as e-beam lithography or colloidal lithography, have been used to obtain ordered arrays. All these technologies have in common several processing steps that can affect the crystalline growth of the nanocolumns. In this work, we present a single lithographic step that permits to grow ordered GaN nanocolumns with different geometries. The patterning is based in the use of a focused ion beam with different doses. With this method has been possible to create GaN nanopillars and nanocylinders.
Funding Projects
Type
Code
Acronym
Leader
Title
Madrid Regional Government
S2009/ESP-1503
Unspecified
Unspecified
Unspecified
More information
| Item ID: | 16342 |
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| DC Identifier: | https://oa.upm.es/16342/ |
| OAI Identifier: | oai:oa.upm.es:16342 |
| DOI: | 10.1016/j.mee.2012.07.006 |
| Official URL: | http://www.sciencedirect.com/science/article/pii/S... |
| Deposited by: | Memoria Investigacion |
| Deposited on: | 03 Aug 2013 08:09 |
| Last Modified: | 30 Nov 2022 09:00 |
