Hydrogenated amorphous silicon deposited by high pressure sputtering for HIT solar cells

García Hernansanz, Rodrigo and García Hemme, Eric and Pastor Pastor, David and Prado Millán, Alvaro del and Mártil de la Plaza, Ignacio and González Díaz, Germán and Olea Ariza, Javier and Ferrer Fernández, Francisco Javier (2013). Hydrogenated amorphous silicon deposited by high pressure sputtering for HIT solar cells. In: "Spanish Conference on Electron Devices (CDE)", 12/02/2013 - 14/02/2013, Valladolid, Spain. pp. 337-340.

Description

Title: Hydrogenated amorphous silicon deposited by high pressure sputtering for HIT solar cells
Author/s:
  • García Hernansanz, Rodrigo
  • García Hemme, Eric
  • Pastor Pastor, David
  • Prado Millán, Alvaro del
  • Mártil de la Plaza, Ignacio
  • González Díaz, Germán
  • Olea Ariza, Javier
  • Ferrer Fernández, Francisco Javier
Item Type: Presentation at Congress or Conference (Article)
Event Title: Spanish Conference on Electron Devices (CDE)
Event Dates: 12/02/2013 - 14/02/2013
Event Location: Valladolid, Spain
Title of Book: Spanish Conference on Electron Devices (CDE)
Date: 2013
Subjects:
Freetext Keywords: Hydrogenated amorphous silicon; intermediate band; high pressure sputtering; HIT cell; composition; absorption bands.
Faculty: Instituto de Energía Solar (IES) (UPM)
Department: Otro
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

Hydrogenated amorphous silicon thin films were deposited using a high pressure sputtering (HPS) system. In this work, we have studied the composition and optical properties of the films (band-gap, absorption coefficient), and their dependence with the deposition parameters. For films deposited at high pressure (1 mbar), composition measurements show a critical dependence of the purity of the films with the RF power. Films manufactured with RF-power above 80W exhibit good properties for future application, similar to the films deposited by CVD (Chemical Vapor Deposition) for hydrogenated amorphous silicon.

More information

Item ID: 26348
DC Identifier: https://oa.upm.es/26348/
OAI Identifier: oai:oa.upm.es:26348
Official URL: http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6481411&tag=1
Deposited by: Memoria Investigacion
Deposited on: 21 May 2014 18:44
Last Modified: 22 Sep 2014 11:40
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