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BAW Resonators Based on AlN with Ir Electrodes for Digital Wireless Transmissions
Citation
Iborra Grau, Enrique and Clement Lorenzo, Marta and Olivares Roza, Jimena and González Castilla, Sheila and Sangrador García, Jesús and Rimmer, Nick and Rastogi, A. and Ivira, B. and Reinhardt, Alexandre (2008). BAW Resonators Based on AlN with Ir Electrodes for Digital Wireless Transmissions. In: "2008 IEEE International Ultrasonics Symposium", 02/11/2008-05/11/2008, Pekin, China. ISBN 978-1-4244-2428-3.
Description
| Title: | BAW Resonators Based on AlN with Ir Electrodes for Digital Wireless Transmissions |
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| Author/s: |
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| Item Type: | Presentation at Congress or Conference (Article) |
| Event Title: | 2008 IEEE International Ultrasonics Symposium |
| Event Dates: | 02/11/2008-05/11/2008 |
| Event Location: | Pekin, China |
| Title of Book: | Proceedings of 2008 IEEE International Ultrasonics Symposium Proceedings |
| Date: | 2 November 2008 |
| ISBN: | 978-1-4244-2428-3 |
| Subjects: | |
| Freetext Keywords: | Iridium, AlN, BAW resonator, BAW filter. |
| Faculty: | E.T.S.I. Telecomunicación (UPM) |
| Department: | Tecnología Electrónica [hasta 2014] |
| Creative Commons Licenses: | Recognition - No derivative works - Non commercial |
Abstract
We investigate the performance of aluminum nitride (AlN)-based solidly mounted resonators (SMR) made with iridium (Ir) electrodes for applications in WCDMA filters. Ir/AlN/Ir stacks are grown on top of insulating Bragg mirrors composed of alternate λ/4 layers of silicon oxycarbide (SiOC) and silicon nitride (Si3N4). We have developed the technological processes for the fabrication of filters including the trimming of the Ir top electrode for the tuning of the bandwidth. The influence of the thickness of the top electrode after the tuning process in the performance of the SMRs and filters is analyzed. The performance of the devices is compared with that of SMRs and filters of identical design made with Mo electrodes.
More information
| Item ID: | 3854 |
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| DC Identifier: | https://oa.upm.es/3854/ |
| OAI Identifier: | oai:oa.upm.es:3854 |
| Official URL: | http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=04803331 |
| Deposited by: | Memoria Investigacion |
| Deposited on: | 29 Jul 2010 10:51 |
| Last Modified: | 20 Apr 2016 13:18 |
