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Plasma basic concepts and nitrogen containing plasmas
Citation
Sanz Lluch, M. del Mar and Tanarro, Isabel (2007). Plasma basic concepts and nitrogen containing plasmas. In: "Nitrides and dilute nitrides: Growth, physics and devices". Transworld Research Network, Trivandrum, India, pp. 15-46. ISBN 978-81-7895-250-5.
Description
| Title: | Plasma basic concepts and nitrogen containing plasmas |
|---|---|
| Author/s: |
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| Item Type: | Book Section |
| Title of Book: | Nitrides and dilute nitrides: Growth, physics and devices |
| Date: | 2007 |
| ISBN: | 978-81-7895-250-5 |
| Subjects: | |
| Faculty: | Otros Centros UPM |
| Department: | Otro |
| Creative Commons Licenses: | Recognition - No derivative works - Non commercial |
Abstract
Basic concepts related to plasmas are described as well as the typical characterization methods currently available. A brief overview about some plasma applications is given, but focusing on plasma used in material processing mainly devoted to the microelectronics industry. Finally, specific applications related to plasma-assisted MBE for nitrides and dilute nitrides are given, showing some interesting research works performed to that purpose, and giving the usual characterization techniques commonly used in such processes.
More information
| Item ID: | 4806 |
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| DC Identifier: | https://oa.upm.es/4806/ |
| OAI Identifier: | oai:oa.upm.es:4806 |
| Official URL: | http://www.trnres.com/ |
| Deposited by: | Memoria Investigacion |
| Deposited on: | 04 Nov 2010 11:40 |
| Last Modified: | 20 Apr 2016 13:53 |
