Finite element method modeling applied to laser crystallization of amorphous silicon

Canteli Pérez Caballero, David, Muñoz Martín, David ORCID: https://orcid.org/0000-0001-5837-6367, Morales Furió, Miguel ORCID: https://orcid.org/0000-0001-7425-9742 and Molpeceres Álvarez, Carlos Luis ORCID: https://orcid.org/0000-0002-6236-8359 (2017). Finite element method modeling applied to laser crystallization of amorphous silicon. In: "10ª Reunión Española de Optoelectrónica, OPTOEL17", 12/07/2017-14/07/2017, Santiago de Compostela, Galicia. pp. 400-402.

Description

Title: Finite element method modeling applied to laser crystallization of amorphous silicon
Author/s:
Item Type: Presentation at Congress or Conference (Article)
Event Title: 10ª Reunión Española de Optoelectrónica, OPTOEL17
Event Dates: 12/07/2017-14/07/2017
Event Location: Santiago de Compostela, Galicia
Title of Book: 10ª Reunión Española de Optoelectrónica, OPTOEL17
Date: July 2017
Subjects:
Freetext Keywords: Laser crystallization; polycrystalline silicon; FEM modelling
Faculty: E.T.S.I. Diseño Industrial (UPM)
Department: Ingeniería Mecánica, Química y Diseño Industrial
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

The crystallization by laser of amorphous or microcrystalline silicon films allows to obtain thin, high-quality, polycrystalline Si films, being a very promising method for diminishing costs in the microelectronic and solar cells sectors. During a laser crystallization process, light is partially absorbed in the amorphous silicon film, heating the sample and, if the temperature rises high enough, causing the reorganization of the film structure into a crys- talline one. In this work we show both experimental results on the crystallization of non-hydrogenated silicon thin-films performed by a continuous wave infrared laser are included, as well as a study of the process with a simple finite elements (FEM) numerical model based in the dimensional non-linear heat transfer equation with a steady heat source.

Funding Projects

Type
Code
Acronym
Leader
Title
Government of Spain
ENE2013- 48629-C4-3-R
HELLO
Universidad Politécnica de Madrid-Centro Láser
Células solares de silicio de alta eficiencia y bajo coste fabricadas a baja temperatura
Government of Spain
ENE2016- 78933-C4-4-R
CHENOC
Universidad Politécnica de Madrid-Centro Láser
Células solares de heterounión de silicio de estructura no convencional

More information

Item ID: 50986
DC Identifier: https://oa.upm.es/50986/
OAI Identifier: oai:oa.upm.es:50986
Official URL: http://www.optoel2017.es/
Deposited by: Memoria Investigacion
Deposited on: 24 May 2018 08:53
Last Modified: 24 May 2018 08:53
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