Direct integration of CNT forests on solidly mounted resonators and their influence on device performance

Mirea, Teona ORCID: https://orcid.org/0000-0003-2324-4895, Olivares Roza, Jimena ORCID: https://orcid.org/0000-0003-4396-4363, Clement Lorenzo, Marta ORCID: https://orcid.org/0000-0003-4956-8206, Sangrador García, Jesús ORCID: https://orcid.org/0000-0001-9582-8692 and Iborra Grau, Enrique ORCID: https://orcid.org/0000-0002-1385-1379 (2017). Direct integration of CNT forests on solidly mounted resonators and their influence on device performance. In: "Proceedings of the 2017 Joint Conference of the European-Frequency-and-Time-Forum / IEEE International Frequency Control Symposium (EFTF/IFCS)", 09/07/2017 - 13/072017, Besancon, France. pp. 1-4. https://doi.org/10.1109/FCS.2017.8088890.

Description

Title: Direct integration of CNT forests on solidly mounted resonators and their influence on device performance
Author/s:
Item Type: Presentation at Congress or Conference (Article)
Event Title: Proceedings of the 2017 Joint Conference of the European-Frequency-and-Time-Forum / IEEE International Frequency Control Symposium (EFTF/IFCS)
Event Dates: 09/07/2017 - 13/072017
Event Location: Besancon, France
Title of Book: Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)
Date: 2017
Subjects:
Freetext Keywords: carbon nanotube forest; solidly mounted resonator; integration; performance influence
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

Carbon nanotubes (CNTs) have been typically employed as active layers in sensors, however their verticallyaligned (forest) morphology has not been fully explored yet. Here we directly integrate CNT forests on AlN-based solidly mounted resonators and study their influence on the performance of the longitudinal and shear mode of operation. Results show that CNT forests induce quality factor degradation and that too tall forests lead to excessive degradation of the frequency response. A trade-off between device performance and surface area increase for better sensing can be found with forests of heights lower than ~ 10 µm. Additionally, we show that the shear mode is less degraded than the longitudinal mode and that multi-walled CNTs degrade in less extend the devices.

Funding Projects

Type
Code
Acronym
Leader
Title
Government of Spain
MAT2013-45957-R
Unspecified
Unspecified
Materiales avanzados para biosensores basados en resonadores piezoeléctricos combinados con nanotubos de carbono y grafeno

More information

Item ID: 54009
DC Identifier: https://oa.upm.es/54009/
OAI Identifier: oai:oa.upm.es:54009
DOI: 10.1109/FCS.2017.8088890
Official URL: https://ieeexplore.ieee.org/document/8088890
Deposited by: Memoria Investigacion
Deposited on: 04 Mar 2019 16:39
Last Modified: 04 Mar 2019 16:39
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