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Mirea, Teona ORCID: https://orcid.org/0000-0003-2324-4895, Olivares Roza, Jimena
ORCID: https://orcid.org/0000-0003-4396-4363, Clement Lorenzo, Marta
ORCID: https://orcid.org/0000-0003-4956-8206, Sangrador García, Jesús
ORCID: https://orcid.org/0000-0001-9582-8692 and Iborra Grau, Enrique
ORCID: https://orcid.org/0000-0002-1385-1379
(2017).
Direct integration of CNT forests on solidly mounted resonators and their influence on device performance.
In: "Proceedings of the 2017 Joint Conference of the European-Frequency-and-Time-Forum / IEEE International Frequency Control Symposium (EFTF/IFCS)", 09/07/2017 - 13/072017, Besancon, France. pp. 1-4.
https://doi.org/10.1109/FCS.2017.8088890.
Title: | Direct integration of CNT forests on solidly mounted resonators and their influence on device performance |
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Author/s: |
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Item Type: | Presentation at Congress or Conference (Article) |
Event Title: | Proceedings of the 2017 Joint Conference of the European-Frequency-and-Time-Forum / IEEE International Frequency Control Symposium (EFTF/IFCS) |
Event Dates: | 09/07/2017 - 13/072017 |
Event Location: | Besancon, France |
Title of Book: | Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) |
Date: | 2017 |
Subjects: | |
Freetext Keywords: | carbon nanotube forest; solidly mounted resonator; integration; performance influence |
Faculty: | E.T.S.I. Telecomunicación (UPM) |
Department: | Ingeniería Electrónica |
Creative Commons Licenses: | Recognition - No derivative works - Non commercial |
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Carbon nanotubes (CNTs) have been typically employed as active layers in sensors, however their verticallyaligned (forest) morphology has not been fully explored yet. Here we directly integrate CNT forests on AlN-based solidly mounted resonators and study their influence on the performance of the longitudinal and shear mode of operation. Results show that CNT forests induce quality factor degradation and that too tall forests lead to excessive degradation of the frequency response. A trade-off between device performance and surface area increase for better sensing can be found with forests of heights lower than ~ 10 µm. Additionally, we show that the shear mode is less degraded than the longitudinal mode and that multi-walled CNTs degrade in less extend the devices.
Item ID: | 54009 |
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DC Identifier: | https://oa.upm.es/54009/ |
OAI Identifier: | oai:oa.upm.es:54009 |
DOI: | 10.1109/FCS.2017.8088890 |
Official URL: | https://ieeexplore.ieee.org/document/8088890 |
Deposited by: | Memoria Investigacion |
Deposited on: | 04 Mar 2019 16:39 |
Last Modified: | 04 Mar 2019 16:39 |