Scandium aluminum nitride-based bulk acoustic wave resonators

Schneider, Michael and Miguel Ramos, Mario de and Flewitt, Andrew John and Iborra Grau, Enrique and Schmid, Ulrich (2017). Scandium aluminum nitride-based bulk acoustic wave resonators. In: "Eurosensors 2017", 03/09/2017 - 6/09/2017, Paris, France. pp. 1-4.


Title: Scandium aluminum nitride-based bulk acoustic wave resonators
  • Schneider, Michael
  • Miguel Ramos, Mario de
  • Flewitt, Andrew John
  • Iborra Grau, Enrique
  • Schmid, Ulrich
Item Type: Presentation at Congress or Conference (Article)
Event Title: Eurosensors 2017
Event Dates: 03/09/2017 - 6/09/2017
Event Location: Paris, France
Title of Book: Proceedings of Eurosensors 2017
Date: 2017
Freetext Keywords: film bulk acoustic resonator; FBAR; solidly mounted resonator; SMR; aluminium nitride; scandium aluminium nitride; electromechanical coupling factor; network analyser
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Film bulk acoustic resonators (FBAR) are promising candidates to replace surface acoustic wave devices as filters or delay lines, but also offer exciting opportunities as biological or gas sensors. In this work, solidly mounted FBARs were manufactured by substituting commonly used pure aluminium nitride (AlN) by scandium doped aluminium nitride (ScAlN) thin films as the piezoelectric layer. The ScAlN-based resonators feature a significant improvement of the electromechanical coupling factor from ~3% to ~12% compared to the pure AlN, while the decreased stiffness of ScAlN results in a decrease of the quality factor from ~300 to ~100 due to increased damping losses in the piezoelectric material.

Funding Projects

Madrid Regional GovernmentMAT2013-45957-RUnspecifiedUnspecifiedMateriales avanzados para biosensores basados en resonadores piezoeléctricos combinados con nanotubos de carbono y grafeno

More information

Item ID: 54014
DC Identifier:
OAI Identifier:
DOI: 10.3390/proceedings1040305
Official URL:
Deposited by: Memoria Investigacion
Deposited on: 19 Feb 2019 16:12
Last Modified: 19 Feb 2019 16:12
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