Microacoustic Sensors with Integrated Carbon Nanotubes for High Voc Sensitivity

Mirea, Teona and Olivares Roza, Jimena and Clement Lorenzo, Marta (2019). Microacoustic Sensors with Integrated Carbon Nanotubes for High Voc Sensitivity. In: "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)", 23/06/2019 - 27/06/2019, Berlin, Germany. pp. 1890-1892. https://doi.org/10.1109/TRANSDUCERS.2019.8808317.

Description

Title: Microacoustic Sensors with Integrated Carbon Nanotubes for High Voc Sensitivity
Author/s:
  • Mirea, Teona
  • Olivares Roza, Jimena
  • Clement Lorenzo, Marta
Item Type: Presentation at Congress or Conference (Article)
Event Title: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
Event Dates: 23/06/2019 - 27/06/2019
Event Location: Berlin, Germany
Title of Book: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
Date: 2019
Subjects:
Freetext Keywords: Solidly mounted resonators; volatile organic compound; carbon nanotubes
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

Electroacoustic resonators have proved to be appropriate candidates as VOC sensors owing to their high mass sensitivity. However, one of their drawbacks is their sensitivity to other external factors like the humidity. Here we propose an AlN-based solidly mounted resonator for VOC detection and humidity discrimination. This ability is achieved by defining different areas within the same device with different resonant characteristics by integrating carbon nanotubes (CNTs) in part of the exposed surface while leaving the other bare. While CNTs act as sensing elements adsorbing VOC molecules, hence originating larger frequency shifts, the bare zone is affected only by the ambient humidity.

More information

Item ID: 65248
DC Identifier: https://oa.upm.es/65248/
OAI Identifier: oai:oa.upm.es:65248
DOI: 10.1109/TRANSDUCERS.2019.8808317
Official URL: https://ieeexplore.ieee.org/abstract/document/8808317
Deposited by: Memoria Investigacion
Deposited on: 19 Apr 2021 12:50
Last Modified: 19 Apr 2021 12:50
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