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Villa López, Farah H., Cole, Marina, Iborra Grau, Enrique ORCID: https://orcid.org/0000-0002-1385-1379, Miguel Ramos, Mario de and Gardner, Julian W.
(2019).
A Solidly Mounted Resonator With CMOS-Fabricated Acoustic Mirror For Low-Cost Air Quality Monitoring.
In: "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)", 23/06/2019 - 27/06/2019, Berlin, Germany. pp. 1242-1245.
https://doi.org/10.1109/TRANSDUCERS.2019.8808790.
Title: | A Solidly Mounted Resonator With CMOS-Fabricated Acoustic Mirror For Low-Cost Air Quality Monitoring |
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Author/s: |
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Item Type: | Presentation at Congress or Conference (Article) |
Event Title: | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) |
Event Dates: | 23/06/2019 - 27/06/2019 |
Event Location: | Berlin, Germany |
Title of Book: | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) |
Date: | 2019 |
Subjects: | |
Freetext Keywords: | Olidly mounted resonator; acoustic mirror; CMOS fabrication; SMR-IC integration; particle sensing; air quality monitoring |
Faculty: | E.T.S.I. Telecomunicación (UPM) |
Department: | Ingeniería Electrónica |
Creative Commons Licenses: | Recognition - No derivative works - Non commercial |
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This work presents a novel Solidly Mounted Resonator (SMR) device for use in a portable, low-cost and low power air quality monitor. The acoustic mirror, an essential part of the SMR device for energy confinement, is fabricated within a CMOS process, and advances upon current acoustic device technology. This CMOS-fabricated acoustic mirror will enable the device to be monolithically integrated and fabricated in high volume with reduced post-processing steps compared to the state-of-the-art acoustic based sensors. The CMOS-fabricated acoustic mirror demonstrated good reflectivity with a high quality factor of 500. Experimental results on particulate matter sensing with the CMOS based SMR sensor showed a response of 117 kHz/ng when detecting fine particles (<1 mu m).
Item ID: | 65252 |
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DC Identifier: | https://oa.upm.es/65252/ |
OAI Identifier: | oai:oa.upm.es:65252 |
DOI: | 10.1109/TRANSDUCERS.2019.8808790 |
Official URL: | https://ieeexplore.ieee.org/document/8808790 |
Deposited by: | Memoria Investigacion |
Deposited on: | 18 Apr 2021 10:31 |
Last Modified: | 24 May 2021 07:36 |