AlN-based solidly mounted resonators at 400 degrees C: in-situ performance monitoring

Mirea, Teona and Olivares Roza, Jimena and Clement Lorenzo, Marta and Sangrador García, Jesús (2019). AlN-based solidly mounted resonators at 400 degrees C: in-situ performance monitoring. In: "Proceedings of the IEEE International Ultrasonics Symposium (IUS)", 06/10/2019 - 09/10/2019, Glasgow, UK. pp. 1700-1702. https://doi.org/10.1109/ULTSYM.2019.8925697.

Description

Title: AlN-based solidly mounted resonators at 400 degrees C: in-situ performance monitoring
Author/s:
  • Mirea, Teona
  • Olivares Roza, Jimena
  • Clement Lorenzo, Marta
  • Sangrador García, Jesús
Item Type: Presentation at Congress or Conference (Article)
Event Title: Proceedings of the IEEE International Ultrasonics Symposium (IUS)
Event Dates: 06/10/2019 - 09/10/2019
Event Location: Glasgow, UK
Title of Book: 2019 IEEE International Ultrasonics Symposium (IUS)
Date: 2019
Subjects:
Freetext Keywords: AlN; solidly mounted resonator; high temperature
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

Acoustic wave sensors, particularly surface acoustic wave (SAW) devices, have been one of the most studied options for high temperature applications. Although they present the big advantage of simple wireless interrogation, they also have disadvantages. These disadvantages include the destructive agglomeration of their metallic thin electrodes. To overcome these issues, AlN-based solidly mounted resonators (SMRs) appear as promising alternatives. Our previous studies have shown they sustain temperatures as high as 1000 degrees C, however their in-situ performance at high temperature during a long period of time has not been performed yet. With this work we continue our previous investigations and we test in real time the performance of SMRs at 400 degrees C during 7 hours.

Funding Projects

TypeCodeAcronymLeaderTitle
Government of SpainTEC2017-84817-C2-1-RUnspecifiedUnspecifiedSensores gravimétricos de gases basados en resonadores electroacústicos de película delgada de ALN para aplicaciones en temperaturas extremas

More information

Item ID: 65259
DC Identifier: https://oa.upm.es/65259/
OAI Identifier: oai:oa.upm.es:65259
DOI: 10.1109/ULTSYM.2019.8925697
Official URL: https://ieeexplore.ieee.org/document/8925697
Deposited by: Memoria Investigacion
Deposited on: 18 Apr 2021 06:43
Last Modified: 19 Apr 2021 12:54
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