Real time thin-film thickness monitoring sensors: a comparative study of dual mode Solidly Mounted Resonators with commercial Quartz Crystal Microbalances

Mirea, Teona and Moreno, Manuel and Chiodarelli, Nicolò and Miguel Ramos, Mario de (2019). Real time thin-film thickness monitoring sensors: a comparative study of dual mode Solidly Mounted Resonators with commercial Quartz Crystal Microbalances. In: "2019 IEEE International Ultrasonics Symposium (IUS)", 06/10/2019 - 09/10/2019, Glasgow, UK. pp. 600-602. https://doi.org/10.1109/ULTSYM.2019.8926219.

Description

Title: Real time thin-film thickness monitoring sensors: a comparative study of dual mode Solidly Mounted Resonators with commercial Quartz Crystal Microbalances
Author/s:
  • Mirea, Teona
  • Moreno, Manuel
  • Chiodarelli, Nicolò
  • Miguel Ramos, Mario de
Item Type: Presentation at Congress or Conference (Article)
Event Title: 2019 IEEE International Ultrasonics Symposium (IUS)
Event Dates: 06/10/2019 - 09/10/2019
Event Location: Glasgow, UK
Title of Book: 2019 IEEE International Ultrasonics Symposium (IUS)
Date: 2019
Subjects:
Freetext Keywords: Solidly mounted resonators; QCM; sensitivity; thin film
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

Full text

[img]
Preview
PDF - Requires a PDF viewer, such as GSview, Xpdf or Adobe Acrobat Reader
Download (1MB) | Preview

Abstract

Next generations of physical and chemical vacuum deposition systems require more accurate and faster sensors to monitor the deposition of very thin films (nm range). Acoustic sensors, particularly QCMs, have been typically used in such systems. However, their potential has reached certain limitations. They are bulky, they need a water-cooling system to work at higher temperatures, and for certain applications their response time is not fast enough. For many years, film bulk acoustic wave resonators (FBARs) working at higher frequencies have been studied as a higher sensitivity alternative to QCMs, particularly in biosensing applications. However, they have been never applied and simultaneously compared to QCMs in an actual PVD system so far. Sorex Sensors has developed an FBAR which not only offers higher mass sensitivity than QCMs but also allows discriminating temperature related effects within the same device without the need of a reference sensor. FBARs can also be integrated in arrays providing a cost-effective and more accurate solution for thin film monitoring. This sensor has been tested simultaneously with a commercial QCM in an evaporator, for benchmarking the characteristic of both technologies in terms of sensitivity.

Funding Projects

TypeCodeAcronymLeaderTitle
Government of SpainTEC2017-84817-C2-1-RUnspecifiedUnspecifiedSensores gravimétricos de gases basados en resonadores electroacústicos de película delgada de ALN para aplicaciones en temperaturas extremas

More information

Item ID: 65261
DC Identifier: https://oa.upm.es/65261/
OAI Identifier: oai:oa.upm.es:65261
DOI: 10.1109/ULTSYM.2019.8926219
Official URL: https://ieeexplore.ieee.org/document/8926219
Deposited by: Memoria Investigacion
Deposited on: 17 Apr 2021 09:27
Last Modified: 19 Apr 2021 12:53
  • Logo InvestigaM (UPM)
  • Logo GEOUP4
  • Logo Open Access
  • Open Access
  • Logo Sherpa/Romeo
    Check whether the anglo-saxon journal in which you have published an article allows you to also publish it under open access.
  • Logo Dulcinea
    Check whether the spanish journal in which you have published an article allows you to also publish it under open access.
  • Logo de Recolecta
  • Logo del Observatorio I+D+i UPM
  • Logo de OpenCourseWare UPM