Export: Fabrication of sub-100 nm IDT SAW devices on insulating, semiconducting and conductive substrates

Fuentes Iriarte, Gonzalo and Rodriguez Madrid, Juan and Calle Gómez, Fernando (2012). Fabrication of sub-100 nm IDT SAW devices on insulating, semiconducting and conductive substrates. "Journal of materials processing technology", v. 212 (n. 3); pp. 707-712. ISSN 0924-0136. https://doi.org/10.1016/j.jmatprotec.2011.08.007.

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