Export: Impact of N2 plasma power and duration on AlGaN/GaN HEMT

Romero Rojo, Fátima and Jiménez, A. and González-Posada Flores, Francisco and Martin Horcajo, Sara and Calle Gómez, Fernando and Muñoz Merino, Elias (2011). Impact of N2 plasma power and duration on AlGaN/GaN HEMT. In: "9th International Conference on Nitride Semiconductors", 10/07/2011 - 15/07/2011, Glasgow, UK. pp..

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