Export: Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators
Iborra Grau, Enrique 
ORCID: https://orcid.org/0000-0002-1385-1379, Clement Lorenzo, Marta ORCID: https://orcid.org/0000-0003-4956-8206, Capilla Osorio, José, Olivares Roza, Jimena ORCID: https://orcid.org/0000-0003-4396-4363 and Felmetsger, Valeriy
(2012).
Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators.
"THIN SOLID FILMS", v. 520
(n. 7);
pp. 3060-3063.
ISSN 0040-6090.
https://doi.org/10.1016/j.tsf.2011.11.007.
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