Export: Piezoelectric and electroacoustic properties of Ti-doped AlN thin films as a function of Ti content

Iborra Grau, Enrique and Capilla Osorio, José and Olivares Roza, Jimena and Clement Lorenzo, Marta and Felmetsger, Valeriy (2012). Piezoelectric and electroacoustic properties of Ti-doped AlN thin films as a function of Ti content. In: "2012 IEEE International Ultrasonics Symposium (IUS)", 07/10/2012 - 10/10/2012, Dresde, Alemania. pp. 2734-2736.

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