Export: Effects of N2 Plasma Pretreatment on the SiN Passivation of AlGaN/GaN HEMT
Romero Rojo, Fátima and Jiménez, A. and Sánchez, José M. and Braña, A.F. and González-Posada Flores, Fernando and Cuerdo Bragado, Roberto and Calle Gómez, Fernando and Muñoz Merino, Elias (2008). Effects of N2 Plasma Pretreatment on the SiN Passivation of AlGaN/GaN HEMT. "IEEE Electron Device Letters", v. 29 (n. 3); pp. 209-211. ISSN 0741-3106. https://doi.org/10.1109/LED.2008.915568.
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