Export: Advanced determination of piezoelectric properties of AlN thin films on silicon substrates
Sánchez de Rojas Aldavero, José Luis, Hernando García, Jorge, Ababneh, A., Schmid, U., Olivares Roza, Jimena 
ORCID: https://orcid.org/0000-0003-4396-4363, Iborra Grau, Enrique ORCID: https://orcid.org/0000-0002-1385-1379 and Clement Lorenzo, Marta ORCID: https://orcid.org/0000-0003-4956-8206
(2008).
Advanced determination of piezoelectric properties of
AlN thin films on silicon substrates.
In: "2008 IEEE International Ultrasonics Symposium", 02/11/2008-05/11/2008, Beijing, China. ISBN 978-1-4244-2428-3. pp. 903-906.
https://doi.org/10.1109/ULTSYM.2008.0218.
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