eprintid: 12382 rev_number: 23 eprint_status: archive userid: 1903 dir: disk0/00/01/23/82 datestamp: 2012-08-10 10:33:57 lastmod: 2020-03-18 11:17:07 status_changed: 2012-08-10 10:33:57 type: article metadata_visibility: show item_issues_count: 0 creators_name: Jimenez Trillo, Juan creators_name: Álvarez, Angel Luis creators_name: Coya, Carmen creators_name: Cespedes, E. creators_name: Espinosa, A. title: The use of arc-erosion as a patterning technique for transparent conductive materials ispublished: pub subjects: materiales abstract: Within the framework of cost-effective patterning processes a novel technique that saves photolithographic processing steps, easily scalable to wide area production, is proposed. It consists of a tip-probe, which is biased with respect to a conductive substrate and slides on it, keeping contact with the material. The sliding tip leaves an insulating path (which currently is as narrow as 30 μm) across the material, which enables the drawing of tracks and pads electrically insulated from the surroundings. This ablation method, called arc-erosion, requires an experimental set up that had to be customized for this purpose and is described. Upon instrumental monitoring, a brief proposal of the physics below this process is also presented. As a result an optimal control of the patterning process has been acquired. The system has been used on different substrates, including indium tin oxide either on glass or on polyethylene terephtalate, as well as alloys like Au/Cr, and Al. The influence of conditions such as tip speed and applied voltage is discussed date: 2011-12 date_type: published publisher: Elsevier id_number: 10.1016/j.tsf.2011.04.153 full_text_status: public publication: Thin Solid Films volume: 520 number: 4 pagerange: 1318-1322 institution: Telecomunicacion department: Tecnologia_Electronica refereed: TRUE issn: 0040-6090 rights: by-nc-nd citation: Jimenez Trillo, Juan and Álvarez, Angel Luis and Coya, Carmen and Cespedes, E. and Espinosa, A. (2011). The use of arc-erosion as a patterning technique for transparent conductive materials. "Thin Solid Films", v. 520 (n. 4); pp. 1318-1322. ISSN 0040-6090. https://doi.org/10.1016/j.tsf.2011.04.153 . document_url: https://oa.upm.es/12382/2/INVE_MEM_2011_112678.pdf