?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.aulast=Martinez+Rodrigo&rft.au=Martinez+Rodrigo%2C+Javier&rft.aufirst=Javier&rft.date=2011&rft.btitle=Proceedings+of+37th+International+Conference+on+Micro+and+Nano+Engineering&rft.title=Fabrication+of+GaN+nanorods+by+focused+ion+beam&rft.genre=proceeding