TY  - CONF
Y1  - 2011///
CY  - Amsterdam
PB  - Elsevier
N2  - Ordered arrays of III-Nitride nanocolumns are excellent candidates for the fabrication of nano-optoelectronic devices. Different technologies such as e-beam lithography or colloidal lithography, have been used to obtain ordered arrays. All these technologies have in common several processing steps that can affect the crystalline growth of the nanocolumns. In this work, we present a single lithographic step that permits to grow ordered GaN nanocolumns with different geometries. The patterning is based in the use of a focusedionbeam with different doses. With this method has been possible to create GaN nanopillars and nanocylinders
AV  - public
ID  - upm12911
UR  - http://www.mne2011.org/
T2  - 37th International Conference on Micro and Nano Engineering
A1  - Martinez Rodrigo, Javier
A1  - Barbagini, Francesca
A1  - Bengoechea Encabo, Ana
A1  - Albert, Steven
A1  - Sánchez García, Miguel Angel
A1  - Calleja Pardo, Enrique
M2  - Berlín, Alemania
TI  - Fabrication of GaN nanorods by focused ion beam
ER  -