eprintid: 12911 rev_number: 18 eprint_status: archive userid: 1903 dir: disk0/00/01/29/11 datestamp: 2012-11-08 11:01:07 lastmod: 2016-04-21 12:14:15 status_changed: 2012-11-08 11:01:07 type: conference_item metadata_visibility: show item_issues_count: 0 creators_name: Martinez Rodrigo, Javier creators_name: Barbagini, Francesca creators_name: Bengoechea Encabo, Ana creators_name: Albert, Steven creators_name: Sánchez García, Miguel Angel creators_name: Calleja Pardo, Enrique creators_orcid: 0000-0002-5912-1128 creators_orcid: 0000-0002-1494-9351 creators_orcid: 0000-0002-3686-8982 title: Fabrication of GaN nanorods by focused ion beam ispublished: pub subjects: electronica subjects: fisica abstract: Ordered arrays of III-Nitride nanocolumns are excellent candidates for the fabrication of nano-optoelectronic devices. Different technologies such as e-beam lithography or colloidal lithography, have been used to obtain ordered arrays. All these technologies have in common several processing steps that can affect the crystalline growth of the nanocolumns. In this work, we present a single lithographic step that permits to grow ordered GaN nanocolumns with different geometries. The patterning is based in the use of a focusedionbeam with different doses. With this method has been possible to create GaN nanopillars and nanocylinders date: 2011 date_type: published publisher: Elsevier official_url: http://www.mne2011.org/ full_text_status: public pres_type: poster place_of_pub: Amsterdam pagerange: 0-0 event_title: 37th International Conference on Micro and Nano Engineering event_location: Berlín, Alemania event_dates: 19/09/2011 - 23/09/2011 event_type: other institution: Isom department: otro refereed: TRUE book_title: Proceedings of 37th International Conference on Micro and Nano Engineering rights: by-nc-nd citation: Martinez Rodrigo, Javier ORCID: https://orcid.org/0000-0002-5912-1128 , Barbagini, Francesca, Bengoechea Encabo, Ana, Albert, Steven, Sánchez García, Miguel Angel ORCID: https://orcid.org/0000-0002-1494-9351 and Calleja Pardo, Enrique ORCID: https://orcid.org/0000-0002-3686-8982 (2011). Fabrication of GaN nanorods by focused ion beam. In: "37th International Conference on Micro and Nano Engineering", 19/09/2011 - 23/09/2011, Berlín, Alemania. pp.. document_url: https://oa.upm.es/12911/1/INVE_MEM_2011_108195.pdf