TY - JOUR SN - 2159-3930 A1 - Choudhury, B. Dev A1 - Casquel del Campo, Rafael A1 - Bañuls, María José A1 - Sanza Gutiérrez, Francisco Javier A1 - Laguna Heras, Maria Fe A1 - Holgado Bolaños, Miguel A1 - Puchades, Rosa A1 - Maquieira, Ángel A1 - Angulo Barrios, Carlos A1 - Anand, S. IS - 7 JF - Optical Materials Express N2 - We present the fabrication of silicon dioxide (SiO2) coated silicon nanopillar array structures and demonstrate their application as sensitive optical biosensors. Colloidal lithography, plasma dry etching and deposition processes are used to fabricate SiO2 coated Si nanopillar arrays with two different diameters and periods. Proof of concept bio recognition experiments are carried out with the bovine serum albumin (BSA)/antiBSA model system using Fourier transform visible and IR spectrometry (FT-VIS-IR) in reflection mode. A limit of detection (LoD) value of 5.2 ng/ml is estimated taking in to account the wavenumber uncertainty in the measurements. KW - OCIS codes: (040.6040) Silicon; (110.4235) Nanolithography; (180.3170) Interference microscopy; (220.4241) Nanostructure fabrication; (260.3160) Interference; (280.1415) Biological sensing and sensors; (280.4788) Optical sensing and sensors; (300.6300) Spectroscopy KW - Fourier transforms; (310.1860) Deposition and fabrication. EP - 1354 Y1 - 2014/// PB - OSA Publishing UR - https://www.osapublishing.org/ome/abstract.cfm?uri=ome-4-7-1345 AV - public SP - 1345 ID - upm35593 TI - Silicon nanopillar arrays with SiO2 overlayer for biosensing application VL - 4 ER -