RT Journal Article SR 00 ID 10.1364/OME.4.001345 A1 Choudhury, B. Dev A1 Casquel del Campo, Rafael A1 Bañuls, María José A1 Sanza Gutiérrez, Francisco Javier A1 Laguna Heras, Maria Fe A1 Holgado Bolaños, Miguel A1 Puchades, Rosa A1 Maquieira, Ángel A1 Angulo Barrios, Carlos A1 Anand, S. T1 Silicon nanopillar arrays with SiO2 overlayer for biosensing application JF Optical Materials Express YR 2014 FD 2014 VO 4 IS 7 SP 1345 OP 1354 K1 OCIS codes: (040.6040) Silicon; (110.4235) Nanolithography; (180.3170) Interference microscopy; (220.4241) Nanostructure fabrication; (260.3160) Interference; (280.1415) Biological sensing and sensors; (280.4788) Optical sensing and sensors; (300.6300) Spectroscopy, Fourier transforms; (310.1860) Deposition and fabrication. AB We present the fabrication of silicon dioxide (SiO2) coated silicon nanopillar array structures and demonstrate their application as sensitive optical biosensors. Colloidal lithography, plasma dry etching and deposition processes are used to fabricate SiO2 coated Si nanopillar arrays with two different diameters and periods. Proof of concept bio recognition experiments are carried out with the bovine serum albumin (BSA)/antiBSA model system using Fourier transform visible and IR spectrometry (FT-VIS-IR) in reflection mode. A limit of detection (LoD) value of 5.2 ng/ml is estimated taking in to account the wavenumber uncertainty in the measurements. PB OSA Publishing SN 2159-3930 LK https://oa.upm.es/35593/ UL https://www.osapublishing.org/ome/abstract.cfm?uri=ome-4-7-1345