eprintid: 3928 rev_number: 44 eprint_status: archive userid: 1903 dir: disk0/00/00/39/28 datestamp: 2010-09-02 08:50:08 lastmod: 2016-04-20 13:20:32 status_changed: 2010-09-02 08:50:08 type: conference_item metadata_visibility: show item_issues_count: 0 creators_name: Clement Lorenzo, Marta creators_name: Olivares Roza, Jimena creators_name: Iborra Grau, Enrique creators_name: González Castilla, Sheila creators_name: Sangrador García, Jesús creators_name: Rimmer, Nick creators_name: Rastogi, A. creators_name: Ivira, B. creators_name: Reinhardt, Alexandre title: Aluminium Nitride Solidly Mounted BAW Resonators with Iridium Electrodes publisher: Braunschweig rights: by-nc-nd ispublished: pub subjects: electronica subjects: fisica full_text_status: public pres_type: paper abstract: In this work we investigated the performance of aluminium nitride (AlN)-based solidly mounted resonators (SMR) made with iridium (Ir) bottom electrodes. Ir/AlN/metal stacks were grown on top of insulating Bragg mirrors composed of alternate λ/4 layers of silicon oxi-carbide (SiOC) and silicon nitride (Si3N4).Ir electrodes of various thicknesses were electron-beam evaporated on different adhesion layers, which also acted as seed layers. AlN was deposited by sputtering after conditioning the Ir electrode by a soft-etch with Ar+ ions, which was essential to achieve high quality AlN films. The structure and morphology of the different layers were analysed by x-ray diffraction (XRD) and atomic force microscopy (AFM). The frequency response of the SMRs was assessed by measuring the input scattering parameterS11 with a network analyzer. The experimental results were fitted to the Butterworth-Van Dyke circuital model. The effective electromechanical coupling factor k2eff, and the quality factor Q of the resonators were derived from the experimental data. The influence of the thickness, crystal quality and roughness of the Ir bottom electrodes on the performance of the resonators was investigated. date_type: published date: 2008-04-22 place_of_pub: Alemania event_title: 22nd European Frequency and Time Forum (EFTF) 2008 event_location: Toulouse, Francia event_dates: 22/04/2008-25/04/2008 event_type: conference institution: Telecomunicacion department: Tecnologia_Electronica refereed: TRUE book_title: Proceedings of 22nd European Frequency and Time Forum (EFTF) 2008 official_url: http://www.eftf.org/proceedings/PDFs/FPE-0159.pdf citation: Clement Lorenzo, Marta and Olivares Roza, Jimena and Iborra Grau, Enrique and González Castilla, Sheila and Sangrador García, Jesús and Rimmer, Nick and Rastogi, A. and Ivira, B. and Reinhardt, Alexandre (2008). Aluminium Nitride Solidly Mounted BAW Resonators with Iridium Electrodes. In: "22nd European Frequency and Time Forum (EFTF) 2008", 22/04/2008-25/04/2008, Toulouse, Francia. document_url: https://oa.upm.es/3928/1/INVE_MEM_2008_57846.pdf