eprintid: 3928
rev_number: 44
eprint_status: archive
userid: 1903
dir: disk0/00/00/39/28
datestamp: 2010-09-02 08:50:08
lastmod: 2016-04-20 13:20:32
status_changed: 2010-09-02 08:50:08
type: conference_item
metadata_visibility: show
item_issues_count: 0
creators_name: Clement Lorenzo, Marta
creators_name: Olivares Roza, Jimena
creators_name: Iborra Grau, Enrique
creators_name: González Castilla, Sheila
creators_name: Sangrador García, Jesús
creators_name: Rimmer, Nick
creators_name: Rastogi, A.
creators_name: Ivira, B.
creators_name: Reinhardt, Alexandre
title: Aluminium Nitride Solidly Mounted BAW Resonators with Iridium Electrodes
publisher: Braunschweig
rights: by-nc-nd
ispublished: pub
subjects: electronica
subjects: fisica
full_text_status: public
pres_type: paper
abstract: In this work we investigated the performance of aluminium nitride (AlN)-based solidly mounted resonators (SMR) made with iridium (Ir) bottom electrodes. Ir/AlN/metal stacks were grown on top of insulating Bragg mirrors composed of alternate λ/4 layers of silicon oxi-carbide (SiOC) and silicon nitride (Si3N4).Ir electrodes of various thicknesses were electron-beam evaporated on different adhesion layers, which also acted as seed layers. AlN was deposited by sputtering after conditioning the Ir electrode by a soft-etch with Ar+ ions, which was essential to achieve high quality AlN films. The structure and morphology of the different layers were analysed by x-ray diffraction (XRD) and atomic force microscopy (AFM). The frequency response of the SMRs was assessed by measuring the input scattering parameterS11 with a network analyzer. The experimental results were fitted to the Butterworth-Van Dyke circuital model. The effective electromechanical coupling factor k2eff, and the quality factor Q of the resonators were derived from the experimental data. The influence of the thickness, crystal quality and roughness of the Ir bottom electrodes on the performance of the resonators was investigated.
date_type: published
date: 2008-04-22
place_of_pub: Alemania
event_title: 22nd European Frequency and Time Forum (EFTF) 2008
event_location: Toulouse, Francia
event_dates: 22/04/2008-25/04/2008
event_type: conference
institution: Telecomunicacion
department: Tecnologia_Electronica
refereed: TRUE
book_title: Proceedings of 22nd European Frequency and Time Forum (EFTF) 2008
official_url: http://www.eftf.org/proceedings/PDFs/FPE-0159.pdf
citation:   Clement Lorenzo, Marta and Olivares Roza, Jimena and Iborra Grau, Enrique and González Castilla, Sheila and Sangrador García, Jesús and Rimmer, Nick and Rastogi, A. and Ivira, B. and Reinhardt, Alexandre  (2008).  Aluminium Nitride Solidly Mounted BAW Resonators with Iridium Electrodes.  In: "22nd European Frequency and Time Forum (EFTF) 2008", 22/04/2008-25/04/2008, Toulouse, Francia.    
document_url: https://oa.upm.es/3928/1/INVE_MEM_2008_57846.pdf