title: Nanostructures with Group IV nanocrystals obtained by LPCVD and thermal annealing of SiGeO layers
creator: Morana, B.
creator: Rodríguez Domínguez, Andrés
creator: Sangrador García, Jesús
creator: Rodríguez Rodríguez, Tomás
creator: Martínez de Quel Pérez, Óscar
creator: Jiménez Leube, Francisco Javier
creator: Kling, Andreas
subject: Physics
subject: Materials
description: Nanocrystals embedded in an oxide matrix have been fabricated by annealing SiGeO films deposited by LPCVD. The composition of the oxide layers and its evolution after annealing as well as the presence and nature of nanocrystals in the films have been studied by several experimental techniques. The results are analyzed and discussed in terms of the main deposition parameters and the annealing temperature.
publisher: E.T.S.I. Telecomunicación (UPM)
rights: https://creativecommons.org/licenses/by-nc-nd/3.0/es/
date: 2008
type: info:eu-repo/semantics/conferenceObject
type: Presentation at Congress or Conference
source: Amorphous and Polycristalline Silicon Science and Technology 2008 | Spring Meeting 2008, Materials Research Society | 24/03/2008-28/03/2008 | San Francisco, California, EEUU
type: PeerReviewed
format: application/pdf
language: eng
relation: http://www.mrs.org/s_mrs/sec.asp?CID=13907&DID=209198
rights: info:eu-repo/semantics/openAccess
identifier: https://oa.upm.es/4402/