%0 Conference Paper
%A Morana, B.
%A Rodríguez Domínguez, Andrés
%A Sangrador García, Jesús
%A Rodríguez Rodríguez, Tomás
%A Martínez de Quel Pérez, Óscar
%A Jiménez Leube, Francisco Javier
%A Kling, Andreas
%B Spring Meeting 2008, Materials Research Society
%C San Francisco, California, EEUU
%D 2008
%F upm:4402
%I Materials Research Society
%T Nanostructures with Group IV nanocrystals obtained by LPCVD and thermal annealing of SiGeO layers
%U https://oa.upm.es/4402/
%V 1066
%X Nanocrystals embedded in an oxide matrix have been fabricated by annealing SiGeO films deposited by LPCVD. The composition of the oxide layers and its evolution after annealing as well as the presence and nature of nanocrystals in the films have been studied by several experimental techniques. The results are analyzed and discussed in terms of the main deposition parameters and the annealing temperature.