TY  - CONF
ID  - upm4402
PB  - Materials Research Society
M2  - San Francisco, California, EEUU
TI  - Nanostructures with Group IV nanocrystals obtained by LPCVD and thermal annealing of SiGeO layers
N2  - Nanocrystals embedded in an oxide matrix have been fabricated by annealing SiGeO films deposited by LPCVD. The composition of the oxide layers and its evolution after annealing as well as the presence and nature of nanocrystals in the films have been studied by several experimental techniques. The results are analyzed and discussed in terms of the main deposition parameters and the annealing temperature.
VL  - 1066
UR  - http://www.mrs.org/s_mrs/sec.asp?CID=13907&DID=209198
Y1  - 2008///
A1  - Morana, B.
A1  - Rodríguez Domínguez, Andrés
A1  - Sangrador García, Jesús
A1  - Rodríguez Rodríguez, Tomás
A1  - Martínez de Quel Pérez, Óscar
A1  - Jiménez Leube, Francisco Javier
A1  - Kling, Andreas
AV  - public
T2  - Spring Meeting 2008, Materials Research Society
CY  - EEUU
ER  -