Items where author is "Pérez Campos, Ana"

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Number of items: 3.

Article

Pérez Campos, Ana and Fuentes Iriarte, Gonzalo and Lebedev, V. and Calle Gómez, Fernando (2015). Electro-optical characterization of IC compatible microcantilevers. "Microsystem Technologies" ; pp. 1-20. ISSN 0946-7076. https://doi.org/10.1007/s00542-015-2629-x.

Pérez Campos, Ana and Fuentes Iriarte, Gonzalo and Hernando García, Jorge and Calle Gómez, Fernando (2015). Post-CMOS compatible high-throughput fabrication of AIN-based piezoelectric microcantilevers. "Journal of Micromechanics and Microengineering", v. 25 (n. 2); pp.. ISSN 0960-1317. https://doi.org/10.1088/0960-1317/25/2/025003.

Thesis

Pérez Campos, Ana (2015). CMOS integration of AlN based piezoelectric microcantilevers. Thesis (Doctoral), E.T.S.I. Telecomunicación (UPM).

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