Fabrication of high frequency SAW resonators using AlN/Diamond/Si technology

Rodriguez Madrid, Juan and Ro, R. and Lee, R. and Williams, Oliver A. and Araujo, Daniel and Calle Gómez, Fernando and Villar, María Del Pilar (2011). Fabrication of high frequency SAW resonators using AlN/Diamond/Si technology. In: "2011 IEEE International Ultrasonics Symposium (IUS)", 18/10/2011 - 21/10/2011, Orlando, Florida, EEUU. ISBN 978-1-4577-1253-1. pp..

Description

Title: Fabrication of high frequency SAW resonators using AlN/Diamond/Si technology
Author/s:
  • Rodriguez Madrid, Juan
  • Ro, R.
  • Lee, R.
  • Williams, Oliver A.
  • Araujo, Daniel
  • Calle Gómez, Fernando
  • Villar, María Del Pilar
Item Type: Presentation at Congress or Conference (Article)
Event Title: 2011 IEEE International Ultrasonics Symposium (IUS)
Event Dates: 18/10/2011 - 21/10/2011
Event Location: Orlando, Florida, EEUU
Title of Book: Proceedings of 2011 IEEE International Ultrasonics Symposium (IUS)
Date: 2011
ISBN: 978-1-4577-1253-1
Subjects:
Faculty: Instituto de Sistemas Optoelectrónicos y Microtecnología (ISOM) (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

The synthesis of AlN on diamond is a great challenge, not only because of the between an AlN/diamond interface, but also because of the high surface roughness of the diamond layers [8, 9]. In the case of microcrystalline diamond, the last problem was solved by polishing. However, polishing nanocrystalline diamond is not straightforward. For the diamond synthesis by CVD, silicon was used as a substrate. The diamond/Si interface presents a smoother diamond than the diamond/air interface. This paper reports on the fabrication of high frequency SAW resonators using AlN/Diamond/Si technology.

More information

Item ID: 12898
DC Identifier: http://oa.upm.es/12898/
OAI Identifier: oai:oa.upm.es:12898
Official URL: http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6293303
Deposited by: Memoria Investigacion
Deposited on: 08 Nov 2012 12:01
Last Modified: 21 Apr 2016 12:13
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