Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators

Iborra Grau, Enrique and Clement Lorenzo, Marta and Capilla Osorio, José and Olivares Roza, Jimena and Felmetsger, Valeriy (2012). Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators. "THIN SOLID FILMS", v. 520 (n. 7); pp. 3060-3063. ISSN 0040-6090. https://doi.org/10.1016/j.tsf.2011.11.007.

Description

Title: Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators
Author/s:
  • Iborra Grau, Enrique
  • Clement Lorenzo, Marta
  • Capilla Osorio, José
  • Olivares Roza, Jimena
  • Felmetsger, Valeriy
Item Type: Article
Título de Revista/Publicación: THIN SOLID FILMS
Date: January 2012
ISSN: 0040-6090
Volume: 520
Subjects:
Freetext Keywords: Piezoelectric AlN; Crystal quality; AC reactive sputtering; Two-step deposition; High frequency solidly mounted resonator; Electromechanical coupling factor; Quality factor
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Tecnología Electrónica [hasta 2014]
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

We investigate the sputter growth of very thin aluminum nitride (AlN) films on iridium electrodes for electroacoustic devices operating in the super high frequency range. Superior crystal quality and low stress films with thicknesses as low as 160 nm are achieved after a radio frequency plasma treatment of the iridium electrode followed by a two-step alternating current reactive magnetron sputtering of an aluminum target, which promotes better conditions for the nucleation of well textured AlN films in the very first stages of growth. Solidly mounted resonators tuned around 8 GHz with effective electromechanical coupling factors of 5.8% and quality factors Q up to 900 are achieved.

More information

Item ID: 15682
DC Identifier: http://oa.upm.es/15682/
OAI Identifier: oai:oa.upm.es:15682
DOI: 10.1016/j.tsf.2011.11.007
Official URL: http://www.sciencedirect.com/science/article/pii/S0040609011019754
Deposited by: Memoria Investigacion
Deposited on: 16 Jun 2013 11:29
Last Modified: 21 Apr 2016 15:56
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