Influence of Crystal Quality on the Excitation and Propagation of Surface and Bulk Acoustic Waves in Polycrystalline AlN Films

Clement Lorenzo, Marta and Olivares Roza, Jimena and Capilla Osorio, José and Sangrador García, Jesús and Iborra Grau, Enrique (2012). Influence of Crystal Quality on the Excitation and Propagation of Surface and Bulk Acoustic Waves in Polycrystalline AlN Films. "IEEE Transactions on Ultrasonics Ferroelectrics and Frequency", v. 59 (n. 1); pp. 128-134. ISSN 0885-3010. https://doi.org/10.1109/TUFFC.2012.2163.

Description

Title: Influence of Crystal Quality on the Excitation and Propagation of Surface and Bulk Acoustic Waves in Polycrystalline AlN Films
Author/s:
  • Clement Lorenzo, Marta
  • Olivares Roza, Jimena
  • Capilla Osorio, José
  • Sangrador García, Jesús
  • Iborra Grau, Enrique
Item Type: Article
Título de Revista/Publicación: IEEE Transactions on Ultrasonics Ferroelectrics and Frequency
Date: January 2012
ISSN: 0885-3010
Volume: 59
Subjects:
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Tecnología Electrónica [hasta 2014]
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

We investigate the excitation and propagation of acoustic waves in polycrystalline aluminum nitride films along the directions parallel and normal to the c-axis. Longitudinal and transverse propagations are assessed through the frequency response of surface acoustic wave and bulk acoustic wave devices fabricated on films of different crystal qualities. The crystalline properties significantly affect the electromechanical coupling factors and acoustic properties of the piezoelectric layers. The presence of misoriented grains produces an overall decrease of the piezoelectric activity, degrading more severely the excitation and propagation of waves traveling transversally to the c-axis. It is suggested that the presence of such crystalline defects in c-axis-oriented films reduces the mechanical coherence between grains and hinders the transverse deformation of the film when the electric field is applied parallel to the surface.

More information

Item ID: 15687
DC Identifier: http://oa.upm.es/15687/
OAI Identifier: oai:oa.upm.es:15687
DOI: 10.1109/TUFFC.2012.2163
Official URL: http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=06138734
Deposited by: Memoria Investigacion
Deposited on: 17 Jun 2013 16:58
Last Modified: 21 Apr 2016 15:57
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