Experimental comparison of FBARs and SMRs responsitivities to mass loadings

García-Gancedo, Luis; Pedrós Ayala, Jorge; Iborra Grau, Enrique; Clement Lorenzo, Marta; Olivares Roza, Jimena; Capilla Osorio, José; Luo, J.K.; Milne, W.I. y Flewitt, A.J. (2012). Experimental comparison of FBARs and SMRs responsitivities to mass loadings. En: "IEEE International Ultrasonics Symposium 2012", 7/10/2012-10/10/2012, Dresden, Germany. pp. 1545-1548. https://doi.org/10.1109/ULTSYM.2012.0386.

Descripción

Título: Experimental comparison of FBARs and SMRs responsitivities to mass loadings
Autor/es:
  • García-Gancedo, Luis
  • Pedrós Ayala, Jorge
  • Iborra Grau, Enrique
  • Clement Lorenzo, Marta
  • Olivares Roza, Jimena
  • Capilla Osorio, José
  • Luo, J.K.
  • Milne, W.I.
  • Flewitt, A.J.
Tipo de Documento: Ponencia en Congreso o Jornada (Artículo)
Título del Evento: IEEE International Ultrasonics Symposium 2012
Fechas del Evento: 7/10/2012-10/10/2012
Lugar del Evento: Dresden, Germany
Título del Libro: Experimental comparison of FBARs and SMRs responsitivities to mass loadings
Título de Revista/Publicación: 2012 IEEE International Ultrasonics Symposium Proceedings
Fecha: 2012
Materias:
Palabras Clave Informales: BAR, SMR, BAW, Zinc Oxide (ZnO),responsitivity, microweighting
Escuela: E.T.S.I. Telecomunicación (UPM)
Departamento: Tecnología Electrónica [hasta 2014]
Licencias Creative Commons: Reconocimiento - Sin obra derivada - No comercial

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Resumen

The utilisation of thin film technology to develop film bulk acoustic resonators (FBARs) and solidly mounted resonators (SMRs), offers great potential to outperform the sensitivity and minimum detection limit of gravimetric sensors. Up to now, the choice between FBARs and SMRs depends primarily on the users' ability to design and fabricate Bragg reflectors and/or membranes, because neither of these two types of resonators has been demonstrated to be superior to the other. In the work reported here, it is shown that identically designed FBARs and SMRs resonating at the same frequency exhibit different responsitivities, Rm, to mass loadings, being the FBARs more responsive than the SMRs. For the specific device design and resonant frequency (~2 GHz) of the resonators presented, FBARs' mass responsitivity is ~20% greater than that of SMRs, and although this value should not be taken as universal for all possible device designs, it clearly indicates that FBAR devices should be favoured over SMRs in gravimetric sensing applications.

Más información

ID de Registro: 15695
Identificador DC: http://oa.upm.es/15695/
Identificador OAI: oai:oa.upm.es:15695
Identificador DOI: 10.1109/ULTSYM.2012.0386
URL Oficial: https://ius2012.ifw-dresden.de/
Depositado por: Memoria Investigacion
Depositado el: 25 Jun 2013 16:28
Ultima Modificación: 16 Abr 2015 13:50
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