Experimental comparison of FBARs and SMRs responsitivities to mass loadings

García-Gancedo, Luis and Pedrós Ayala, Jorge and Iborra Grau, Enrique and Clement Lorenzo, Marta and Olivares Roza, Jimena and Capilla Osorio, José and Luo, J.K. and Milne, W.I. and Flewitt, A.J. (2012). Experimental comparison of FBARs and SMRs responsitivities to mass loadings. In: "IEEE International Ultrasonics Symposium 2012", 7/10/2012-10/10/2012, Dresden, Germany. pp. 1545-1548. https://doi.org/10.1109/ULTSYM.2012.0386.

Description

Title: Experimental comparison of FBARs and SMRs responsitivities to mass loadings
Author/s:
  • García-Gancedo, Luis
  • Pedrós Ayala, Jorge
  • Iborra Grau, Enrique
  • Clement Lorenzo, Marta
  • Olivares Roza, Jimena
  • Capilla Osorio, José
  • Luo, J.K.
  • Milne, W.I.
  • Flewitt, A.J.
Item Type: Presentation at Congress or Conference (Article)
Event Title: IEEE International Ultrasonics Symposium 2012
Event Dates: 7/10/2012-10/10/2012
Event Location: Dresden, Germany
Title of Book: Experimental comparison of FBARs and SMRs responsitivities to mass loadings
Título de Revista/Publicación: 2012 IEEE International Ultrasonics Symposium Proceedings
Date: 2012
Subjects:
Freetext Keywords: BAR, SMR, BAW, Zinc Oxide (ZnO),responsitivity, microweighting
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Tecnología Electrónica [hasta 2014]
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

The utilisation of thin film technology to develop film bulk acoustic resonators (FBARs) and solidly mounted resonators (SMRs), offers great potential to outperform the sensitivity and minimum detection limit of gravimetric sensors. Up to now, the choice between FBARs and SMRs depends primarily on the users' ability to design and fabricate Bragg reflectors and/or membranes, because neither of these two types of resonators has been demonstrated to be superior to the other. In the work reported here, it is shown that identically designed FBARs and SMRs resonating at the same frequency exhibit different responsitivities, Rm, to mass loadings, being the FBARs more responsive than the SMRs. For the specific device design and resonant frequency (~2 GHz) of the resonators presented, FBARs' mass responsitivity is ~20% greater than that of SMRs, and although this value should not be taken as universal for all possible device designs, it clearly indicates that FBAR devices should be favoured over SMRs in gravimetric sensing applications.

More information

Item ID: 15695
DC Identifier: http://oa.upm.es/15695/
OAI Identifier: oai:oa.upm.es:15695
DOI: 10.1109/ULTSYM.2012.0386
Official URL: https://ius2012.ifw-dresden.de/
Deposited by: Memoria Investigacion
Deposited on: 25 Jun 2013 16:28
Last Modified: 16 Apr 2015 13:50
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