High precision pressure sensors based on SAW devices in the GHz range

Rodriguez Madrid, Juan and Fuentes Iriarte, Gonzalo and Williams, Oliver A. and Calle Gómez, Fernando (2013). High precision pressure sensors based on SAW devices in the GHz range. "Sensors and Actuators A: Physical", v. 189 ; pp. 364-369. ISSN 0924-4247. https://doi.org/10.1016/j.sna.2012.09.012.

Description

Title: High precision pressure sensors based on SAW devices in the GHz range
Author/s:
  • Rodriguez Madrid, Juan
  • Fuentes Iriarte, Gonzalo
  • Williams, Oliver A.
  • Calle Gómez, Fernando
Item Type: Article
Título de Revista/Publicación: Sensors and Actuators A: Physical
Date: January 2013
ISSN: 0924-4247
Volume: 189
Subjects:
Freetext Keywords: AlN/free-standing diamond; Nucleation side; High frequency; SAW resonators; Pressure sensor
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

In this paper, an AlN/free-standing nanocrystalline diamond (NCD) system is proposed in order to process high frequency surface acoustic wave (SAW) resonators for sensing applications. The main problem of synthetic diamond is its high surface roughness that worsens the sputtered AlN quality and hence the device response. In order to study the feasibility of this structure, AlN films from 150 nm up to 1200 nm thick have been deposited on free-standing NCD. We have then analysed the influence of the AlN layer thickness on its crystal quality and device response. Optimized thin films of 300 nm have been used to fabricate of one-port SAW resonators operating in the 10–14 GHz frequency range. A SAW based sensor pressure with a sensibility of 0.33 MHz/bar has been fabricated.

More information

Item ID: 15777
DC Identifier: http://oa.upm.es/15777/
OAI Identifier: oai:oa.upm.es:15777
DOI: 10.1016/j.sna.2012.09.012
Official URL: http://www.sciencedirect.com/science/article/pii/S0924424712005596
Deposited by: Memoria Investigacion
Deposited on: 29 Jun 2013 08:12
Last Modified: 01 Feb 2015 23:56
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