E-beam nano-patterning for the ordered growth of GaN/InGaN nanorods

Barbagini, Francesca and Bengoechea Encabo, Ana and Albert, Steven and Lefebvre, P. and Martinez Rodrigo, Javier and Sánchez García, Miguel Angel and Trampert, Achim and Calleja Pardo, Enrique (2012). E-beam nano-patterning for the ordered growth of GaN/InGaN nanorods. "Microelectronic Engineering", v. 98 ; pp. 374-377. ISSN 0167-9317. https://doi.org/10.1016/j.mee.2012.07.024.

Description

Title: E-beam nano-patterning for the ordered growth of GaN/InGaN nanorods
Author/s:
  • Barbagini, Francesca
  • Bengoechea Encabo, Ana
  • Albert, Steven
  • Lefebvre, P.
  • Martinez Rodrigo, Javier
  • Sánchez García, Miguel Angel
  • Trampert, Achim
  • Calleja Pardo, Enrique
Item Type: Article
Título de Revista/Publicación: Microelectronic Engineering
Date: October 2012
ISSN: 0167-9317
Volume: 98
Subjects:
Freetext Keywords: E-beam lithography, Nitride nanorods, Ordered growth
Faculty: Instituto de Sistemas Optoelectrónicos y Microtecnología (ISOM) (UPM)
Department: Otro
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

E-beam lithography was used to pattern a titanium mask on a GaN substrate with ordered arrays of nanoholes. This patterned mask served as a template for the subsequent ordered growth of GaN/InGaN nanorods by plasma-assisted molecular beam epitaxy. The mask patterning process was optimized for several holes configurations. The smallest holes were 30 nm in diameter with a pitch (center-to-center distance) of 100 nm only. High quality masks of several geometries were obtained that could be used to grow ordered GaN/InGaN nanorods with full selectivity (growth localized inside the nanoholes only) over areas of hundreds of microns. Although some parasitic InGaN growth occurred between the nanorods during the In incorporation, transmission electron microscopy and photoluminescence measurements demonstrated that these ordered nanorods exhibit high crystal quality and reproducible optical properties.

More information

Item ID: 16338
DC Identifier: http://oa.upm.es/16338/
OAI Identifier: oai:oa.upm.es:16338
DOI: 10.1016/j.mee.2012.07.024
Official URL: http://www.sciencedirect.com/science/article/pii/S0167931712003061
Deposited by: Memoria Investigacion
Deposited on: 23 Jul 2013 17:06
Last Modified: 01 Nov 2014 23:56
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