Laser Shock Micro-Forming as an Emerging Technique for Microsystems Shaping and Adjustment

Ocaña Moreno, José Luis and Morales Furió, Miguel and Garcia Garcia, Oscar and Porro González, Juan Antonio and Correa Guinea, Carlos and García-Ballesteros Ramírez, Juan José (2013). Laser Shock Micro-Forming as an Emerging Technique for Microsystems Shaping and Adjustment. In: "4M2013 Conference. 10th International Conference on Multi-Material Micro Manufacture", 08/10/2013-10/10/2013, San Sebastián, España. ISBN 978-981-07-7248-2.

Description

Title: Laser Shock Micro-Forming as an Emerging Technique for Microsystems Shaping and Adjustment
Author/s:
  • Ocaña Moreno, José Luis
  • Morales Furió, Miguel
  • Garcia Garcia, Oscar
  • Porro González, Juan Antonio
  • Correa Guinea, Carlos
  • García-Ballesteros Ramírez, Juan José
Item Type: Presentation at Congress or Conference (Article)
Event Title: 4M2013 Conference. 10th International Conference on Multi-Material Micro Manufacture
Event Dates: 08/10/2013-10/10/2013
Event Location: San Sebastián, España
Title of Book: Proceedings of the 10th International Conference on Multi-Material Micro Manufacture
Date: 2013
ISBN: 978-981-07-7248-2
Subjects:
Freetext Keywords: Laser micro-forming, Short pulse lasers, Shock forming, Microsystems shaping and adjustment
Faculty: E.T.S.I. Industriales (UPM)
Department: Física Aplicada a la Ingeniería Industrial [hasta 2014]
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

Continuous and long-pulse lasers have been extensively used for the forming of metal sheets for macroscopic mechanical applications. However, for the manufacturing of Micro-Mechanical Systems (MMS), the applicability of such type of lasers is limited by the long relaxation time of the thermal fields responsible for the forming phenomena. As a consequence, the final sheet deformation state is attained only after a certain time, what makes the generated internal residual stress fields more dependent on ambient conditions and might difficult the subsequent assembly process. The use of short pulse (ns) lasers provides a suitable parameter matching for the laser forming of an important range of sheet components used in MEMS. The short interaction time scale required for the predominantly mechanic (shock) induction of deformation residual stresses allows the successful processing of components in a medium range of miniaturization (particularly important according to its frequent use in such systems). In the present paper, Laser Shock Micro-Forming (LSμF) is presented as an emerging technique for Microsystems parts shaping and adjustment along with a discussion on its physical foundations and practical implementation possibilities developed by the authors.

More information

Item ID: 26527
DC Identifier: http://oa.upm.es/26527/
OAI Identifier: oai:oa.upm.es:26527
Official URL: http://rpsonline.com.sg/proceedings/9789810772475/index.html
Deposited by: Memoria Investigacion
Deposited on: 08 May 2015 16:31
Last Modified: 06 Mar 2017 19:15
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