Silicon nanopillar arrays with SiO2 overlayer for biosensing application

Choudhury, B. Dev and Casquel del Campo, Rafael and Bañuls, María José and Sanza Gutiérrez, Francisco Javier and Laguna Heras, Maria Fe and Holgado Bolaños, Miguel and Puchades, Rosa and Maquieira, Ángel and Angulo Barrios, Carlos and Anand, S. (2014). Silicon nanopillar arrays with SiO2 overlayer for biosensing application. "Optical Materials Express", v. 4 (n. 7); pp. 1345-1354. ISSN 2159-3930. https://doi.org/10.1364/OME.4.001345.

Description

Title: Silicon nanopillar arrays with SiO2 overlayer for biosensing application
Author/s:
  • Choudhury, B. Dev
  • Casquel del Campo, Rafael
  • Bañuls, María José
  • Sanza Gutiérrez, Francisco Javier
  • Laguna Heras, Maria Fe
  • Holgado Bolaños, Miguel
  • Puchades, Rosa
  • Maquieira, Ángel
  • Angulo Barrios, Carlos
  • Anand, S.
Item Type: Article
Título de Revista/Publicación: Optical Materials Express
Date: 2014
ISSN: 2159-3930
Volume: 4
Subjects:
Freetext Keywords: OCIS codes: (040.6040) Silicon; (110.4235) Nanolithography; (180.3170) Interference microscopy; (220.4241) Nanostructure fabrication; (260.3160) Interference; (280.1415) Biological sensing and sensors; (280.4788) Optical sensing and sensors; (300.6300) Spectroscopy, Fourier transforms; (310.1860) Deposition and fabrication.
Faculty: E.T.S.I. Industriales (UPM)
Department: Física Aplicada e Ingeniería de Materiales
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

We present the fabrication of silicon dioxide (SiO2) coated silicon nanopillar array structures and demonstrate their application as sensitive optical biosensors. Colloidal lithography, plasma dry etching and deposition processes are used to fabricate SiO2 coated Si nanopillar arrays with two different diameters and periods. Proof of concept bio recognition experiments are carried out with the bovine serum albumin (BSA)/antiBSA model system using Fourier transform visible and IR spectrometry (FT-VIS-IR) in reflection mode. A limit of detection (LoD) value of 5.2 ng/ml is estimated taking in to account the wavenumber uncertainty in the measurements.

Funding Projects

TypeCodeAcronymLeaderTitle
Government of SpainTEC2012-31145PLATONUnspecifiedUnspecified
Government of SpainCTQ2010-15943MASCREENUnspecifiedUnspecified
FP7248855N4EUnspecifiedNanophotonics for Energy Efficiency

More information

Item ID: 35593
DC Identifier: http://oa.upm.es/35593/
OAI Identifier: oai:oa.upm.es:35593
DOI: 10.1364/OME.4.001345
Official URL: https://www.osapublishing.org/ome/abstract.cfm?uri=ome-4-7-1345
Deposited by: Memoria Investigacion
Deposited on: 15 Feb 2016 16:23
Last Modified: 21 May 2019 08:14
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