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Morales Furió, Miguel; Muñoz Martín, David; Chen, Yu; Garcia Garcia, Oscar; García-Ballesteros Ramírez, Juan José; Carabe, J.; Gandía, J. J. y Molpeceres Álvarez, Carlos Luis (2014). Study of a-Si crystallization dependence on power and irradiation time using a CW green laser. En: "Laser-based Micro- and Nanoprocessing VIII", March 6, 2014, San Francisco EE.UU.. ISBN 9780819498816. pp. 1-10.
Título: | Study of a-Si crystallization dependence on power and irradiation time using a CW green laser |
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Autor/es: |
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Tipo de Documento: | Ponencia en Congreso o Jornada (Artículo) |
Título del Evento: | Laser-based Micro- and Nanoprocessing VIII |
Fechas del Evento: | March 6, 2014 |
Lugar del Evento: | San Francisco EE.UU. |
Título del Libro: | Proc. SPIE 8968, Laser-based Micro- and Nanoprocessing VIII |
Fecha: | 25 Marzo 2014 |
ISBN: | 9780819498816 |
Volumen: | 8968 |
Materias: | |
Palabras Clave Informales: | amorphous silicon, polycrystalline silicon, crystallization, annealing, laser, simulation |
Escuela: | E.T.S.I. Industriales (UPM) |
Departamento: | Física Aplicada e Ingeniería de Materiales |
Licencias Creative Commons: | Ninguna |
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An advantage of laser crystallization over conventional heating methods is its ability to limit rapid heating and cooling to thin surface layers. Laser energy is used to heat the a-Si thin film to change the microstructure to poly-Si. Thin film samples of a-Si were irradiated with a CW-green laser source. Laser irradiated spots were produced by using different laser powers and irradiation times. These parameters are identified as key variables in the crystallization process. The power threshold for crystallization is reduced as the irradiation time is increased. When this threshold is reached the crystalline fraction increases lineally with power for each irradiation time. The experimental results are analysed with the aid of a numerical thermal model and the presence of two crystallization mechanisms are observed: one due to melting and the other due to solid phase transformation.
Tipo | Código | Acrónimo | Responsable | Título |
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Gobierno de España | ENE2011-23359 | SIMLASPV | Sin especificar | Sin especificar |
Gobierno de España | IPT-420000-2010-6 | INNDISOL | Sin especificar | Sin especificar |
Gobierno de España | ENE2010- 21384-C04-02 | AMIC | Sin especificar | Sin especificar |
ID de Registro: | 37624 |
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Identificador DC: | http://oa.upm.es/37624/ |
Identificador OAI: | oai:oa.upm.es:37624 |
URL Oficial: | http://spie.org/Publications/Proceedings/Volume/8968 |
Depositado por: | Memoria Investigacion |
Depositado el: | 07 Mar 2016 16:36 |
Ultima Modificación: | 21 Ago 2017 11:51 |