Deposition reactors for solar grade silicon: a comparative thermal analysis of a Siemens reactor and a fluidized bed reactor

Ramos Cabal, Alba and Filtvedt, W.O. and Lindholm, D. and Ramachandran, P.A. and Rodríguez, A. and Cañizo Nadal, Carlos del (2016). Deposition reactors for solar grade silicon: a comparative thermal analysis of a Siemens reactor and a fluidized bed reactor. "Journal of Crystal Growth" ; ISSN 0022-0248. https://doi.org/10.1016/j.jcrysgro.2015.08.023.

Description

Title: Deposition reactors for solar grade silicon: a comparative thermal analysis of a Siemens reactor and a fluidized bed reactor
Author/s:
  • Ramos Cabal, Alba
  • Filtvedt, W.O.
  • Lindholm, D.
  • Ramachandran, P.A.
  • Rodríguez, A.
  • Cañizo Nadal, Carlos del
Item Type: Article
Título de Revista/Publicación: Journal of Crystal Growth
Date: 2016
ISSN: 0022-0248
Subjects:
Freetext Keywords: CVD reactors, Polysilicon, Solar Grade Silicon, Siemens process, Fluidized Bed Reactor, CFD Modelling
Faculty: Instituto de Energía Solar (IES) (UPM)
Department: Electrónica Física
UPM's Research Group: Silicio y Nuevos Conceptos para Células Solares
Creative Commons Licenses: None

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Abstract

Polysilicon production costs contribute approximately to 25-33% of the overall cost of the solar panels and a similar fraction of the total energy invested in their fabrication. Understanding the energy losses and the behaviour of process temperature is an essential requirement as one moves forward to design and build large scale polysilicon manufacturing plants. In this paper we present thermal models for two processes for poly production, viz., the Siemens process using trichlorosilane (TCS) as precursor and the fluid bed process using silane (monosilane, MS).We validate the models with some experimental measurements on prototype laboratory reactors relating the temperature profiles to product quality. A model sensitivity analysis is also performed, and the efects of some key parameters such as reactor wall emissivity, gas distributor temperature, etc., on temperature distribution and product quality are examined. The information presented in this paper is useful for further understanding of the strengths and weaknesses of both deposition technologies, and will help in optimal temperature profiling of these systems aiming at lowering production costs without compromising the solar cell quality.

Funding Projects

TypeCodeAcronymLeaderTitle
Government of SpainIPT 2012-0340-120000NATRISCarlos del CañizoNueva era de reactores productores de triclorosilano y polisilicio para aplicaciones fotovoltaicas
Madrid Regional GovernmentS2013/MAE-2780Madrid-PVAntonio Martí VegaMateriales, dispositivos y tecnología para el desarrollo de la industria fotovoltaica

More information

Item ID: 37804
DC Identifier: http://oa.upm.es/37804/
OAI Identifier: oai:oa.upm.es:37804
DOI: 10.1016/j.jcrysgro.2015.08.023
Official URL: https://doi.org/10.1016/j.jcrysgro.2015.08.023
Deposited by: Profesor Titular Carlos del Cañizo Nadal
Deposited on: 15 Sep 2015 10:20
Last Modified: 13 Mar 2019 14:31
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