Texto completo
Vista Previa |
PDF (Portable Document Format)
- Se necesita un visor de ficheros PDF, como GSview, Xpdf o Adobe Acrobat Reader
Descargar (928kB) | Vista Previa |
Plasma basic concepts and nitrogen containing plasmas
Cita
Sanz Lluch, M. del Mar 
ORCID: https://orcid.org/0000-0002-7810-7460 and Tanarro, Isabel
(2007).
Plasma basic concepts and nitrogen containing plasmas.
En:
"Nitrides and dilute nitrides: Growth, physics and devices".
Transworld Research Network, Trivandrum, India, pp. 15-46.
ISBN 978-81-7895-250-5.
ORCID: https://orcid.org/0000-0002-7810-7460 and Tanarro, Isabel
(2007).
Plasma basic concepts and nitrogen containing plasmas.
En:
"Nitrides and dilute nitrides: Growth, physics and devices".
Transworld Research Network, Trivandrum, India, pp. 15-46.
ISBN 978-81-7895-250-5.
Descripción
| Título: | Plasma basic concepts and nitrogen containing plasmas |
|---|---|
| Autor/es: |
|
| Tipo de Documento: | Sección de Libro |
| Título del Libro: | Nitrides and dilute nitrides: Growth, physics and devices |
| Fecha: | 2007 |
| ISBN: | 978-81-7895-250-5 |
| Materias: | |
| ODS: | |
| Escuela: | Otros Centros UPM |
| Departamento: | Otro |
| Licencias Creative Commons: | Reconocimiento - Sin obra derivada - No comercial |
Resumen
Basic concepts related to plasmas are described as well as the typical characterization methods currently available. A brief overview about some plasma applications is given, but focusing on plasma used in material processing mainly devoted to the microelectronics industry. Finally, specific applications related to plasma-assisted MBE for nitrides and dilute nitrides are given, showing some interesting research works performed to that purpose, and giving the usual characterization techniques commonly used in such processes.
Más información
| ID de Registro: | 4806 |
|---|---|
| Identificador DC: | https://oa.upm.es/4806/ |
| Identificador OAI: | oai:oa.upm.es:4806 |
| URL Oficial: | http://www.trnres.com/ |
| Depositado por: | Memoria Investigacion |
| Depositado el: | 04 Nov 2010 11:40 |
| Ultima Modificación: | 20 Abr 2016 13:53 |
Acciones
- Estadísticas
- Exportar cita
- Editar (sólo personal del Archivo)
