Texto completo
Vista Previa |
PDF (Portable Document Format)
- Se necesita un visor de ficheros PDF, como GSview, Xpdf o Adobe Acrobat Reader
Descargar (316kB) | Vista Previa |
Scandium aluminum nitride-based bulk acoustic wave resonators
Cita
Schneider, Michael, Miguel Ramos, Mario de, Flewitt, Andrew John, Iborra Grau, Enrique 
ORCID: https://orcid.org/0000-0002-1385-1379 and Schmid, Ulrich
(2017).
Scandium aluminum nitride-based bulk acoustic wave resonators.
En: "Eurosensors 2017", 03/09/2017 - 6/09/2017, Paris, France. pp. 1-4.
https://doi.org/10.3390/proceedings1040305.
ORCID: https://orcid.org/0000-0002-1385-1379 and Schmid, Ulrich
(2017).
Scandium aluminum nitride-based bulk acoustic wave resonators.
En: "Eurosensors 2017", 03/09/2017 - 6/09/2017, Paris, France. pp. 1-4.
https://doi.org/10.3390/proceedings1040305.
Descripción
| Título: | Scandium aluminum nitride-based bulk acoustic wave resonators |
|---|---|
| Autor/es: |
|
| Tipo de Documento: | Ponencia en Congreso o Jornada (Artículo) |
| Título del Evento: | Eurosensors 2017 |
| Fechas del Evento: | 03/09/2017 - 6/09/2017 |
| Lugar del Evento: | Paris, France |
| Título del Libro: | Proceedings of Eurosensors 2017 |
| Fecha: | 2017 |
| Materias: | |
| ODS: | |
| Palabras Clave Informales: | film bulk acoustic resonator; FBAR; solidly mounted resonator; SMR; aluminium nitride; scandium aluminium nitride; electromechanical coupling factor; network analyser |
| Escuela: | E.T.S.I. Telecomunicación (UPM) |
| Departamento: | Ingeniería Electrónica |
| Licencias Creative Commons: | Reconocimiento - Sin obra derivada - No comercial |
Resumen
Film bulk acoustic resonators (FBAR) are promising candidates to replace surface acoustic wave devices as filters or delay lines, but also offer exciting opportunities as biological or gas sensors. In this work, solidly mounted FBARs were manufactured by substituting commonly used pure aluminium nitride (AlN) by scandium doped aluminium nitride (ScAlN) thin films as the piezoelectric layer. The ScAlN-based resonators feature a significant improvement of the electromechanical coupling factor from ~3% to ~12% compared to the pure AlN, while the decreased stiffness of ScAlN results in a decrease of the quality factor from ~300 to ~100 due to increased damping losses in the piezoelectric material.
Proyectos asociados
Tipo
Código
Acrónimo
Responsable
Título
Comunidad de Madrid
MAT2013-45957-R
Sin especificar
Sin especificar
Materiales avanzados para biosensores basados en resonadores piezoeléctricos combinados con nanotubos de carbono y grafeno
Más información
| ID de Registro: | 54014 |
|---|---|
| Identificador DC: | https://oa.upm.es/54014/ |
| Identificador OAI: | oai:oa.upm.es:54014 |
| Identificador DOI: | 10.3390/proceedings1040305 |
| URL Oficial: | https://www.mdpi.com/2504-3900/1/4/305 |
| Depositado por: | Memoria Investigacion |
| Depositado el: | 19 Feb 2019 16:12 |
| Ultima Modificación: | 19 Feb 2019 16:12 |
Acciones
- Estadísticas
- Exportar cita
- Editar (sólo personal del Archivo)
