Thermal shields for heat loss reduction in Siemens-type CVD reactors

Ramos Cabal, Alba; Valdehita Torija, Javier; Zamorano Saavedra, Juan Carlos y Cañizo Nadal, Carlos del (2016). Thermal shields for heat loss reduction in Siemens-type CVD reactors. "Journal of Solid State Science and Technology" ; ISSN 2162-8769.

Descripción

Título: Thermal shields for heat loss reduction in Siemens-type CVD reactors
Autor/es:
  • Ramos Cabal, Alba
  • Valdehita Torija, Javier
  • Zamorano Saavedra, Juan Carlos
  • Cañizo Nadal, Carlos del
Tipo de Documento: Artículo
Título de Revista/Publicación: Journal of Solid State Science and Technology
Fecha: Marzo 2016
Materias:
Palabras Clave Informales: CVD reactors, Siemens process, Radiation heat loss, Polysilicon, Solar Grade Silicon
Escuela: Instituto de Energía Solar (IES) (UPM)
Departamento: Electrónica Física
Grupo Investigación UPM: Silicio y Nuevos Conceptos para Células Solares
Licencias Creative Commons: Ninguna

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Resumen

The use of thermal shields to reduce radiation heat loss in Siemens-type CVD reactors is analyzed, both theoretically and experimentally. The potential savings from the use of the thermal shields is first explored using a radiation heat model that takes emissivity variations with wavelength into account, which is important for materials that do not behave as grey bodies. The theoretical calculations confirm that materials with lower surface emissivity lead to higher radiation savings. Assuming that radiation heat loss is responsible for around 50% of the total power consumption, a reduction of 32.9% and 15.5% is obtained if thermal shields with constant emissivities of 0.3 and 0.7 are considered, respectively. Experiments considering different thermal shields are conducted in a laboratory CVD reactor, confirming that the real materials do not behave as grey bodies, and proving that significant energy savings in the polysilicon deposition process are obtained. Using silicon as a thermal shield leads to energy savings of between 26.5-28.5%. For wavelength-dependent emissivities, the model shows that there are significant differences in radiation heat loss, of around 25%, when compared to that of constant emissivity. The results of the model highlight the importance of having reliable data on the emissivities within the relevant range of wavelengths, and at deposition temperatures, which remains a pending issue.

Proyectos asociados

TipoCódigoAcrónimoResponsableTítulo
Gobierno de EspañaIPT 2012-0340-120000NATRISCarlos del CañizoNueva era de reactores productores de triclorosilano y polisilicio para aplicaciones fotovoltaicas
Comunidad de MadridS2013/MAE-2780MADRID-PVAntonio MartíAn integrated program in photovoltaics devoted to promote a new generation of materials, cells and systems through the research, training, dissemination and cooperation

Más información

ID de Registro: 38994
Identificador DC: http://oa.upm.es/38994/
Identificador OAI: oai:oa.upm.es:38994
Depositado por: Profesor Titular Carlos del Cañizo Nadal
Depositado el: 11 Ene 2016 14:38
Ultima Modificación: 31 Oct 2017 23:30
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