Thermal shields for heat loss reduction in Siemens-type CVD reactors

Ramos Cabal, Alba and Valdehita Torija, Javier and Zamorano Saavedra, Juan Carlos and Cañizo Nadal, Carlos del (2016). Thermal shields for heat loss reduction in Siemens-type CVD reactors. "Journal of Solid State Science and Technology", v. 5 (n. 3); pp.. ISSN 2162-8769. https://doi.org/10.1149/2.0171603jss.

Description

Title: Thermal shields for heat loss reduction in Siemens-type CVD reactors
Author/s:
  • Ramos Cabal, Alba
  • Valdehita Torija, Javier
  • Zamorano Saavedra, Juan Carlos
  • Cañizo Nadal, Carlos del
Item Type: Article
Título de Revista/Publicación: Journal of Solid State Science and Technology
Date: March 2016
ISSN: 2162-8769
Volume: 5
Subjects:
Freetext Keywords: CVD reactors, Siemens process, Radiation heat loss, Polysilicon, Solar Grade Silicon
Faculty: Instituto de Energía Solar (IES) (UPM)
Department: Electrónica Física
UPM's Research Group: Silicio y Nuevos Conceptos para Células Solares
Creative Commons Licenses: None

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Abstract

The use of thermal shields to reduce radiation heat loss in Siemens-type CVD reactors is analyzed, both theoretically and experimentally. The potential savings from the use of the thermal shields is first explored using a radiation heat model that takes emissivity variations with wavelength into account, which is important for materials that do not behave as grey bodies. The theoretical calculations confirm that materials with lower surface emissivity lead to higher radiation savings. Assuming that radiation heat loss is responsible for around 50% of the total power consumption, a reduction of 32.9% and 15.5% is obtained if thermal shields with constant emissivities of 0.3 and 0.7 are considered, respectively. Experiments considering different thermal shields are conducted in a laboratory CVD reactor, confirming that the real materials do not behave as grey bodies, and proving that significant energy savings in the polysilicon deposition process are obtained. Using silicon as a thermal shield leads to energy savings of between 26.5-28.5%. For wavelength-dependent emissivities, the model shows that there are significant differences in radiation heat loss, of around 25%, when compared to that of constant emissivity. The results of the model highlight the importance of having reliable data on the emissivities within the relevant range of wavelengths, and at deposition temperatures, which remains a pending issue.

Funding Projects

TypeCodeAcronymLeaderTitle
Government of SpainIPT 2012-0340-120000NATRISCarlos del CañizoNueva era de reactores productores de triclorosilano y polisilicio para aplicaciones fotovoltaicas
Madrid Regional GovernmentS2013/MAE-2780MADRID-PVAntonio Martí VegaMateriales, dispositivos y tecnología para el desarrollo de la industria fotovoltaica

More information

Item ID: 38994
DC Identifier: http://oa.upm.es/38994/
OAI Identifier: oai:oa.upm.es:38994
DOI: 10.1149/2.0171603jss
Official URL: http://jss.ecsdl.org/content/5/3/P172.abstract
Deposited by: Profesor Titular Carlos del Cañizo Nadal
Deposited on: 11 Jan 2016 14:38
Last Modified: 13 Mar 2019 14:59
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